Derived Boundary Conditions for Viscous Thermal Oxidation Equations in Pressure Potential Form

机译：压力势形式的粘性热氧化方程的导出边界条件

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Boundary conditions for viscous flow thermal oxidation equations in pressure potential form are derived in a way which is physically consistent and also convenient for practical implementation. A role of the incompressibility constraint on oxide boundary is emphasised. A possibility to employ the standard piece-wise linear finite element or finite volume discretization schemes is justified. Importance and correctness of the derived boundary conditions are practically demonstrated in the simulation of the standard LOCOS process.

机译：以物理上一致且便于实际实施的方式导出压力势形式的粘性流热氧化方程的边界条件。强调了不可压缩约束对氧化物边界的作用。有理由采用标准的分段线性有限元或有限体积离散化方案。在标准LOCOS过程的仿真中实际证明了导出边界条件的重要性和正确性。

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来源
《Simulation of semiconductor processes and devices 1998(SISPAD98)》|1998年|384-387|共4页
会议地点 Leuven(BE);Leuven(BE)
作者
S. Mijalkovic; W. Joppich;
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作者单位

Faculty of Electronic Engineering, University of Nis Beogradska 14, 18000 Nis, Yugoslavia;

Institute for Algorithms and Scientific Computing, GMD Schloss Birlinghoven, D-53754 Sankt Augustin, Germany;

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原文格式 PDF
正文语种 eng
中图分类半导体器件制造工艺及设备;
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5. A variational derivation of P(N) equations and boundary conditions in planar and three-dimensional geometries [D] . Rulko, Robert Pawel 1991

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6. Experimental and theoretical thermal equations of state of MgSiO3 post-perovskite at multi-megabar pressures [O] . Takeshi Sakai, Haruhiko Dekura, Naohisa Hirao -1

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7. Derived Boundary Conditions for Viscous Thermal Oxidation Equations in Pressure Potential Form [O] . S. Mijalkovic, W. Joppich 2007

机译：压力势形式的粘性热氧化方程的导出边界条件

Derived Boundary Conditions for Viscous Thermal Oxidation Equations in Pressure Potential Form

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