Exponential Expansion for Rapid and Accurate Extraction of Interconnect Capacitance

机译：快速准确提取互连电容的指数级扩展

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We report a new approach for efficient computation of capacitance in multi-conductor systems embedded in homogeneous or multiple dielectric media. The technique employs exponential expansion of the Green's function 1/τ for evaluation of the three-dimensional potential and its gradient, enabling rapid and accurate extraction of interconnect capacitance in VLSI and large-area amorphous silicon electronics. Additionally, it can be used for analysis of electrostatic interaction in micro-electro-mechanical systems (MEMS).

机译：我们报告了一种新方法，可以有效地计算嵌入均匀或多种介电介质的多导体系统中的电容。该技术利用格林函数1 /τ的指数扩展来评估三维电位及其梯度，从而能够快速准确地提取VLSI和大面积非晶硅电子器件中的互连电容。另外，它可用于分析微机电系统（MEMS）中的静电相互作用。

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来源
《Simulation of semiconductor processes and devices 1998(SISPAD98)》|1998年|65-68|共4页
会议地点 Leuven(BE);Leuven(BE)
作者
Hoan H. Pham; Arokia Nathan;
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Department of Electrical and Computer Engineering University of Waterloo, Waterloo, Ontario, Canada N2L 3G1;

Department of Electrical and Computer Engineering University of Waterloo, Waterloo, Ontario, Canada N2L 3G1;

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原文格式 PDF
正文语种 eng
中图分类半导体器件制造工艺及设备;
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1. Fast and Accurate Characterization of MOS and Interconnect Capacitance Using Direct Charge Measurement (DCM) [J] . Goto, M., Miyake, IEEE Transactions on Semiconductor Manufacturing . 2013,第3期

机译：使用直接电荷测量（DCM）快速准确地表征MOS和互连电容
2. Fast and accurate quasi-three-dimensional capacitance determinationof multilayer VLSI interconnects [J] . Woojin Jin, Yungseon Eo, Eisenstadt W.R., IEEE transactions on very large scale integration (VLSI) systems . 2001,第3期

机译：多层VLSI互连的快速准确的准三维电容确定
3. 3-D IC Interconnect Capacitance Extraction Using Dual Discrete Geometric Methods With Prism Elements [J] . X. Xu, Z. Ren, H. Qu, IEEE transactions on very large scale integration (VLSI) systems . 2016,第4期

机译：使用带有棱镜元素的双离散几何方法提取3D IC互连电容
4. Exponential Expansion for Rapid and Accurate Extraction of Interconnect Capacitance [C] . Hoan H. Pham, Arokia Nathan International conference on simulation of semiconductor devices and processes . 1998

机译：用于快速和准确提取互连电容的指数膨胀
5. A parasitic capacitance extraction method for VLSI interconnect modeling [D] . Dengi, Enis Aykut 1997

机译：用于VLSI互连建模的寄生电容提取方法
6. Quantum Capacitance Extraction for Carbon Nanotube Interconnects [O] . Vidur Parkash, Ashok K Goel 2010

机译：碳纳米管互连的量子电容提取
7. Exponential Expansion for Rapid and Accurate Extraction of Interconnect Capacitance [O] . Hoan H. Pham, Arokia Nathan 2015

机译：指数扩展可快速准确地提取互连电容

Exponential Expansion for Rapid and Accurate Extraction of Interconnect Capacitance

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