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首页> 外文会议>Society of Photo-Optical Instrumentation Engineers (SPIE);SPIE Proceedings >Hyperspectral imaging with MEMs integrated focal plane arrays.
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Hyperspectral imaging with MEMs integrated focal plane arrays.

机译：使用MEM的高光谱成像集成了焦平面阵列。

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Hyperspectral imaging has been receiving much attention for its potential for high-resolution imaging andtarget recognition, chemical analysis and spectroscopy. In target recognition, identifying targets incluttered and partially obscured environments requires the analysis of spectral content of the scenery.Spectroscopy type of applications can benefit from the real-time data collection of spatial and spectralcontent in a single image capture. We report on the design, simulation and fabrication of integrating MEMstunable Fabry-Perot etalon filters with 2 dimensional InGaAs focal plane arrays for simultaneous spectraland spatial imaging. By tuning the transmission wavelength of the MEMs based filter, the spectralinformation is provided at each pixel of the photodiode array. The MEMs device is based on two InP/airgapDBR reflectors, and a single wavelength air cavity that separates them. The selective etching ofInGaAs forms the air gaps that suspend the quarter wavelength InP reflector layers. The top mirrorreflectivity as well as the cavity air-gap is tuned by deflecting the suspended InP layer through a reversebiased p-i-n junction. Due to the high refractive index contrast of InP and air, the spectral width of the DBRreflectors is wide enough to block transmitted light from 1000nm to 1700nm, allowing the InGaAsabsorber layer to detect only the MEMs filtered spectral content. A theoretical study on wide tuning rangedesigns and the expected FWHM will be presented.
机译：高光谱成像因其在高分辨率成像和目标识别，化学分析和光谱学方面的潜力而备受关注。在目标识别中，识别目标包括倾斜和部分遮挡的环境需要分析风景的光谱内容。光谱类型的应用程序可以在单个图像捕获中受益于空间和光谱内容的实时数据收集。我们报告了将MEMstunable Fabry-Perot标准具滤波器与二维InGaAs焦平面阵列集成在一起以进行同时的光谱和空间成像的设计，仿真和制造。通过调整基于MEMs的滤光片的传输波长，在光电二极管阵列的每个像素处提供了光谱信息。 MEMs设备基于两个InP / airgapDBR反射器和一个将它们分开的单波长气腔。 InGaAs的选择性刻蚀形成气隙，该气隙使四分之一波长的InP反射层悬挂。通过使悬浮的InP层通过反向偏置的p-i-n结偏转来调整顶部镜面反射率以及腔体气隙。由于InP和空气的高折射率对比，DBR反射器的光谱宽度足够宽，可以阻挡1000nm至1700nm的透射光，从而使InGaAs吸收层仅能检测到MEMs过滤后的光谱含量。将介绍有关宽调谐范围设计和预期的FWHM的理论研究。

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