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首页> 外文会议>Society of Vacuum Coaters 46th Annual Technical Conference; May 3-8, 2003; San Francisco, California USA >Influence of Steering Magnetic Field on the Composition and Intensity of the Ion Flux Generated in Arc Discharges
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Influence of Steering Magnetic Field on the Composition and Intensity of the Ion Flux Generated in Arc Discharges

机译：转向磁场对电弧放电中离子通量的组成和强度的影响

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摘要

External magnetic fields are used extensively to steer the cathode spot of arc discharges in order to improve target utilization and minimize droplet generation. Optical emission spectroscopy and electrostatic probe measurements were used to characterize the effect of the external magnetic field on the ion flux and plasma composition. The shape and strength of the magnetic field on the cathode surface was varied by a combination of a permanent magnet array and an electromagnetic coil positioned concentrically in the planar rectangular geometry. The field strengths measured with a Hall probe were in the range of up to 15 mT. It was found that the magnetic field strongly influenced the emission from Cr~0 metal neutral species while this effect was weaker for Cr~(2+) and Cr~(1+) emission, indicating that the ion to neutral ratio was affected appreciably. The total ion saturation current density, measured by a flat electrostatic probe, was influenced strongly with values increasing from 2 to 12 mAcm~(-2), depending on the particular shape and strength of the magnetic field. Time resolved measurements of a particular position on the arc cathode revealed that an Ar plasma is trapped near the cathode and is sustained without the presence of the cathode spot.
机译：外部磁场广泛用于控制电弧放电的阴极点，以提高目标利用率并最大程度地减少液滴的产生。使用发射光谱和静电探针测量来表征外部磁场对离子通量和等离子体组成的影响。阴极表面上磁场的形状和强度通过永磁体阵列和同心放置在平面矩形几何形状中的电磁线圈的组合而改变。用霍尔探头测得的场强范围高达15 mT。研究发现，磁场强烈地影响了Cr〜0金属中性物种的发射，而对于Cr〜（2+）和Cr〜（1+）发射的影响较弱，表明离子与中性比受到显着影响。由扁平静电探针测得的总离子饱和电流密度受到很大影响，其值从2 mA增加到12 mAcm〜（-2），具体取决于磁场的形状和强度。对电弧阴极上特定位置的时间分辨测量显示，氩气等离子体被困在阴极附近，并且在没有阴极斑点的情况下得以维持。

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