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首页> 外文会议>Society of Vacuum Coaters 46th Annual Technical Conference; May 3-8, 2003; San Francisco, California USA >Ultrabarrier Protective Coatings for Atmospherically Sensitive Thin-Film Electronic Devices
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Ultrabarrier Protective Coatings for Atmospherically Sensitive Thin-Film Electronic Devices

机译：用于大气敏感的薄膜电子设备的超阻隔保护涂层

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摘要

Multilayer organic/inorganic structures are being developed for use as ultrabarrier protective coatings for thin-film electronic applications. These barrier coatings are used to directly encapsulate the electronic device to improve lifetime and performance, and are expected to replace existing parylene, epoxy, and other single layer inorganic methods that do not provide the required resistance to oxygen and water vapor transmission. It is estimated that an oxygen transmission rate (OTR) of 10~(-3) cc/m~2/day and a water vapor transmission rate (WVTR) of 10~(-6)g/m~2/day is needed to protect these atmospherically sensitive devices. The ultrabarrier encapsulation coating consists of alternating acrylate polymer and metal oxide layers, and is deposited in an inline vacuum coater by the process developed at Pacific Northwest National Laboratory. The ultrabarrier process was first tested on calcium test coupons to verify permeation resistance and establish process parameters to achieve 500 hrs at 60℃/ 90% RH with < 10% change in optical transmission, and then transferred to thin film CIGSS, Cu(In,Ga)Se_2, photovoltaic (PV) cells. Based on accelerated environmental test conditions, and an ELH bulb-based simulator for the photovoltaic cells, the ultrabarrier structure provided sufficient OTR and WVTR protection levels to achieve the required lifetime of 1,000 hours of operation at 60℃/90% RH with less than 10% loss in efficiency.
机译：多层有机/无机结构正在开发中，用作薄膜电子应用的超阻隔保护涂层。这些阻隔涂层用于直接封装电子设备以提高使用寿命和性能，并有望替代现有的聚对二甲苯，环氧和其他单层无机方法，这些方法无法提供所需的抗氧气和水蒸气透过性。估计需要10〜（-3）cc / m〜2 /天的氧气透过率（OTR）和10〜（-6）g / m〜2 /天的水蒸气透过率（WVTR）保护这些对大气敏感的设备。超阻隔涂层由交替的丙烯酸酯聚合物和金属氧化物层组成，并通过太平洋西北国家实验室开发的方法沉积在在线真空镀膜机中。首先在钙测试试样上测试了超阻挡层工艺，以验证其抗渗透性并建立工艺参数以在60°C / 90％RH下达到500小时，光透射率变化小于10％，然后转移到薄膜CIGSS，Cu（In， Ga）Se_2，光伏（PV）电池。基于加速的环境测试条件，以及用于光伏电池的基于ELH灯泡的仿真器，超屏障结构提供了足够的OTR和WVTR保护等级，以实现在60℃/ 90％RH且小于10的条件下可工作1,000小时的使用寿命效率损失百分比。

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