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首页> 外文会议>Society of Vacuum Coaters Annual Technical Conference; 20050423-28; Denver,CO(US) >Combination of Hollow Cathode and Vacuum Arc Plasma for Effective Hard Material Coatings on Tools
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Combination of Hollow Cathode and Vacuum Arc Plasma for Effective Hard Material Coatings on Tools

机译：空心阴极和真空电弧等离子体的结合，可在工具上形成有效的硬质材料涂层

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摘要

In order to provide a sufficient wear protection of tools, which finally supports the increase of the productivity in the manufacturing process, the tools can be coated with hard material thin films according to state-of-the-art. Nowadays, the titanium-aluminium-nitride (TiAlN) coating is one of the standard coatings as titannitride (TiN) was in the past. Therefore, many investigations to improve TiAIN performance were carried out. Vacuum arc sources (VARC) are used for electron impact heating and metal-ion etching of substrates, as well as metal evaporation sources in PVD- coating processes. Alternatively, the hollow cathode plasma source (HC) can be used for the in situ pre-treatment of the substrates i.e. for electron impact heating and argon-ion etching. It was demonstrated that hollow cathode plasma sources can additional be used for nitriding of suitable substrates prior to the actual hard material coating process (duplex technology). Further, the integration of the hollow cathode plasma sources in the vacuum arc coating process itself was carried out. The parallel operation of these two devices was tested and the conjoint generated plasma was characterized by optical emission spectroscopy (OES). A comparison of decomposition of hydrocarbon gases using VARC and HC was done and characterized by quadra-pole mass spectroscopy (QMS).
机译：为了提供对工具的足够的磨损保护，其最终支持制造过程中生产率的提高，可以根据最新技术在工具上涂覆硬质材料薄膜。如今，氮化钛铝（TiAlN）涂层是过去的钛氮化物（TiN）的标准涂层之一。因此，进行了许多改善TiAIN性能的研究。真空电弧源（VARC）用于基板的电子冲击加热和金属离子蚀刻，以及PVD涂层工艺中的金属蒸发源。或者，空心阴极等离子体源（HC）可用于基体的原位预处理，即用于电子冲击加热和氩离子蚀刻。已经证明，在实际的硬质材料涂覆工艺（双工技术）之前，空心阴极等离子体源还可用于氮化合适的基材。此外，在真空电弧涂覆过程本身中进行了空心阴极等离子体源的整合。测试了这两种设备的并行操作，并通过光发射光谱（OES）表征了联合产生的等离子体。使用VARC和HC对烃类气体的分解进行了比较，并通过四极质谱（QMS）进行了表征。

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