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首页> 外文会议>Society of Vacuum Coaters Annual Technical Conference; 20050423-28; Denver,CO(US) >Advanced Rotatabie Magnetron Module Designed for Large Area Glass Coaters
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Advanced Rotatabie Magnetron Module Designed for Large Area Glass Coaters

机译：专为大面积玻璃镀膜机设计的高级Rotatabie磁控管模块

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摘要

The rotatable magnetron has advanced to the core sputtering tool for large area glass coating. The advantages of rotatable magnetrons over conventional planar magnetrons are larger material stock, higher power density, higher target utilization and less debris formation. Uninterrupted campaign times of several weeks are achieved. The application of high power levels per magnetron guarantees for high productivity of the coating lines. We have developed a rotatable magnetron module for large area architectural coating. This module is based on our 780 mm pitch compartment concept. The robust straightforward design allows for easy maintenance of both magnetron and magnetron surroundings. A dedicated module controller controls all components belonging to the module as there are: valves, mass flow controllers, pressure gauges, sensors, drives, power supply units, etc. In addition, this controller accommodates the PEM process control system which so far was installed as an independent system. Completed with our advanced fast response gas inlet system, this controller allows for the stabilization of working points along the entire process characteristic curve. AC power supply units with low arc energy that meet the demands of high power sputtering processes have been qualified. Different application examples using dual rotatable magnetrons are presented.
机译：可旋转的磁控管已经发展为用于大面积玻璃涂层的核心溅射工具。与传统的平面磁控管相比，可旋转磁控管的优势在于更大的材料库存，更高的功率密度，更高的靶材利用率和更少的碎屑形成。连续几个星期的竞选时间就可以实现。每个磁控管施加高功率水平可确保涂层生产线的高生产率。我们开发了用于大面积建筑涂料的可旋转磁控管模块。该模块基于我们的780 mm节距隔室概念。坚固，简单的设计可轻松维护磁控管和磁控管环境。专用的模块控制器可控制属于该模块的所有组件，包括：阀，质量流量控制器，压力表，传感器，驱动器，电源单元等。此外，该控制器还包含迄今为止已安装的PEM过程控制系统作为一个独立的系统。该控制器配有先进的快速响应气体入口系统，可沿整个过程特性曲线稳定工作点。满足高功率溅射工艺要求的低电弧能量交流电源装置已经过鉴定。给出了使用双旋转磁控管的不同应用示例。

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