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首页> 外文会议>Society of Vacuum Coaters Annual Technical Conference; 20050423-28; Denver,CO(US) >Uniform Glow-Like Atmospheric DBD for Surface Treatment and Deposition
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Uniform Glow-Like Atmospheric DBD for Surface Treatment and Deposition

机译：均匀的类似辉光的大气DBD，用于表面处理和沉积

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摘要

We present a setup consisting of parallel plate dielectric barrier discharge (DBD) and a dedicated electronic circuit. Using the dedicated electronic circuit, a uniform glow-like discharge can be generated in several process gases at several driving frequencies. The frequencies range from one kHz to several hundreds of kHz. The discharge is characterized by means of IV-measurements and CCD images. Helium, argon, nitrogen, oxygen and combinations thereof are used as process gases. The discharge is used for surface treatment of polymers, as well as plasma enhanced chemical vapor deposition (PECVD) of thin films on polymers. In the case of PECVD, hexamethyldisiloxane (HMDSO) is added to the process gas as a precursor for the thin film deposition. The setup is configured in such a way that the treated polymer also serves as the dielectric barrier of the DBD. The polymers can be transported across the electrodes in a roll-to-roll process. The treated surfaces are characterized by means of contact angle measurements and ATR-FTIR analysis.
机译：我们提出了一种由平行板介电势垒放电（DBD）和专用电子电路组成的设置。使用专用电子电路，可以在几种驱动频率下的几种工艺气体中产生均匀的类似辉光的放电。频率范围从1 kHz到数百kHz。放电通过IV测量和CCD图像进行表征。氦气，氩气，氮气，氧气及其组合用作工艺气体。放电用于聚合物的表面处理，以及聚合物上薄膜的等离子体增强化学气相沉积（PECVD）。在PECVD的情况下，将六甲基二硅氧烷（HMDSO）作为薄膜沉积的前体添加到工艺气体中。以这样的方式配置设置，使得处理后的聚合物还充当DBD的介电屏障。聚合物可以在卷对卷过程中跨电极传输。通过接触角测量和ATR-FTIR分析来表征处理过的表面。

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