AN INTEGRATED CHEMICAL SENSOR ARRAY USING CARBON BLACKPOLYMERS AND A STANDARD CMOS PROCESS

机译：使用碳黑 r n聚合物和标准CMOS工艺的集成化学传感器阵列

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We have developed a new chemical sensor array by combiningrnpolymer-based chemiresistors with a standard integrated circuitrntechnology. We fabricated an array of addressable chemical sensorrnsites in a CMOS process, and then performed a post-processingrnstep of electroless gold to create sensor contacts. We create sensorsrnby spraying a mixture of nonconductive polymers and carbonrnblack particles onto the sensor sites. We demonstrate that an arrayrnof diverse chemical sensors can perform discrimination of odors.

机译：通过将基于聚合物的化学电阻与标准集成电路技术相结合，我们开发了一种新的化学传感器阵列。我们在CMOS工艺中制造了可寻址化学传感器阵列，然后执行了化学镀金的后处理步骤以创建传感器触点。我们通过将非导电聚合物和炭黑颗粒的混合物喷涂到传感器部位来创建传感器。我们证明了arrayrnof不同的化学传感器可以执行气味的辨别。

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来源
《Solid-state sensor and actuator workshop : Technical digest》|2000年|p.162-165|共4页
会议地点 Hilton Head Island SC(US)
作者
Jeffrey A. Dickson; Michael S. Freund; Nathan S. Lewis; Rodney M. Goodman;
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作者单位

Department of Electrical Engineering California Institute of Technology Pasadena, California 9 1125;

Department of Chemistry California Institute of Technology Pasadena, California 91125;

Department of Chemistry California Institute of Technology Pasadena, California 91125;

Department of Electrical Engineering California Institute of Technology Pasadena, California 9 1125;

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原文格式 PDF
正文语种 eng
中图分类 TM938.865;
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3. DESIGN AND PROCESSING OF INTEGRATED MICRO ACCEL-EROMETERS USING STANDARD CMOS PROCESS [J] . Ching-Liang Dai, Shui-Shong Lu, Pei-Zen Chang Journal of the Chinese Institute of Engineers . 1997,第1期

机译：基于标准CMOS工艺的集成微加速度计的设计与加工
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机译：一种使用炭黑聚合物和标准CMOS工艺的综合化学传感器阵列
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机译：基于炭黑和聚合物薄膜的集成化学传感器，使用标准的cmos工艺和后处理

AN INTEGRATED CHEMICAL SENSOR ARRAY USING CARBON BLACKPOLYMERS AND A STANDARD CMOS PROCESS

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