PACKAGE LEVEL INTEGRATION OF SILICON MICROFABRICATEDREACTORS TO FORM A MINIATURE REACTOR TEST SYSTEM

机译：硅微粉 r n反应器的包装水平集成以形成微型反应器测试系统

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A method for packaging microfabricated reactors is describedrnthat allows for the creation of parallel arrays of operating devicesrnfor scalsup purposes. As a packaging demonstration, thesernmicroreactors are being coupled with microvalves and MEMSrnmass flow controllers to form a miniature microreactor test station.rnA novel method based on Known Good Die technology is used forrnthe electrical and fluidic interfaces to the microreactors. Thernmicrofluidic components are mounted on standard circuit boardsrnthat have the monitoring and control circuitry along with fluidicrnconnections. The boards are housed in a standard 6U CompactPCIrnchassis utilizing its backplane for the electrical connectionsrnbetween boards. This system will be the first demonstration of arnscalable, parallel microreactor array that integrates reactors withrnother microfluidic devices and the electronic circuitry needed forrnmonitoring and control.

机译：描述了一种用于包装微型制造的反应器的方法，该方法允许为了扩大规模而创建平行的操作装置阵列。作为包装演示，将微反应器与微型阀和MEMS流量控制器耦合，以形成微型微反应器测试站。基于已知良模技术的新型方法用于微反应器的电气和流体接口。微流体组件安装在标准电路板上，该电路板具有监视和控制电路以及流体连接。这些板容纳在标准的6U CompactPCIrnchassis中，利用其底板进行板之间的电气连接。该系统将是可扩展的，平行的微反应器阵列的第一个演示，该阵列将反应器与其他微流体装置以及监视和控制所需的电子电路集成在一起。

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《Solid-state sensor and actuator workshop : Technical digest》|2000年|p.166-169|共4页
会议地点 Hilton Head Island SC(US)
作者
David J. Quiram; Klavs F. Jensen; Martin A. Schmidt; James F. Ryley; Patrick L. Mills; Mark D. Wetzel; James W. Ashmead; Richard D. Bryson; Daniel J. JXraus; Alan P. Stamford; Steven J. Medwin; Russell E. Mitchell;
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Dept. of Chemical Engineering Massachusetts Institute of Technology Cambridge, MA 02139;

rnDept. of Chemical Engineering Massachusetts Institute of Technology Cambridge, MA 02139;

rnDept. of Electrical Engineering and Computer Science Massachusetts Institute of Technology Cambridge, MA 02139;

rnDuPont Central Research and Development Wilmington, DE 19880-0357;

rnDuPont Central Research and Development Wilmington, DE 19880-0357;

rnDuPont Central Research and Development Wilmington, DE 19880-0357;

rnDuPont Central Research and Development Wilmington, DE 19880-0357;

rnDuPont Central Research and Development Wilmington, DE 19880-0357;

rnDuPont Central Research and Development Wilmington, DE 19880-0357;

rnDuPont Central Research and Development Wilmington, DE 19880-0357;

rnENSER Corporation Cinnaminson, NJ 08077;

rnENSER Corporation Cinnaminson, NJ 08077;

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正文语种 eng
中图分类 TM938.865;
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4. Package level integration of silicon microfabricated reactors to form a miniature reactor test system [C] . David J. Quiram, Klavs F. Jensen, Martin A. Schmidt, Solid-State Sensor and Actuator Workshop . 2000

机译：硅片微型反应器的包装水平集成形成微型反应器测试系统
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机译：西部楼级电炉水平表明系统在拱晶型试验中分析。 PWR
8. Analysis of the Performance of the Westinghouse Reactor Vessel Level Indicating System for Tests at Semiscale. [R] . Hardy, J. E., Miller, G. N. 1982

机译：西洋屋反应堆船舶液位指示系统在半圆形测试中的性能分析。

PACKAGE LEVEL INTEGRATION OF SILICON MICROFABRICATEDREACTORS TO FORM A MINIATURE REACTOR TEST SYSTEM

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