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首页> 外文会议>Solid-state sensor and actuator workshop : Technical digest >MESHLESS TECHNIQUES FOR EFFICIENT SIMULATION OF NON-LINEARBEHAVIOR IN ELECTROSTATIC MEMS
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MESHLESS TECHNIQUES FOR EFFICIENT SIMULATION OF NON-LINEARBEHAVIOR IN ELECTROSTATIC MEMS

机译：静电MEMS中非线性 r n行为高效仿真的无网格技术

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摘要

Accurate analysis of electrostatic MEMS and therndevelopment of reliable reduced-order (or macro) models for rapidrnsystem-level analysis requires proper understanding and therncharacterization of the non-linearity in electrostatic devices. Thernuse of linear theories instead of non-linear theories can producerninaccurate results and the use of non-linear theories, in situationsrnwhere linear theories can produce accurate results, can be veryrnexpensive and time consuming. Hence, it is critical to identify thernregimes where linear and non-linear theories are valid. Simulationrnof non-linear behavior in electrostatic devices using classicalrnfinite-difference and finite-element methods can be very inefficientrnbecause of complex meshing requirements. We propose new nonlinearrnmeshless techniques for efficient simulation of electrostaticrnMEMS. The key results of this paper are two-fold: (i) therndevelopment of new meshless techniques for radically simplerrnanalysis of electrostatic MEMS and (ii) the identification of thernregimes where linear and non-linear theories are accurate and thernvarious parameters that contribute to the non-linearity inrnelectrostatic devices.
机译：静电MEMS的准确分析和快速系统级分析的可靠降阶（或宏）模型的开发要求对静电器件的非线性有适当的了解和表征。线性理论代替非线性理论的使用会产生不准确的结果，而在线性理论可以产生准确结果的情况下，非线性理论的使用可能非常昂贵且耗时。因此，在线性和非线性理论有效的情况下，确定热工制度至关重要。由于复杂的啮合要求，使用经典的有限差分法和有限元方法在静电设备中模拟非线性行为可能会非常低效。我们提出了新的非线性无网格技术，用于静电MEMS的高效仿真。本文的主要结果有两个方面：（i）开发新的无网格技术，从根本上简化静电MEMS的分析；（ii）识别线性和非线性理论准确且对非稳态有贡献的各种参数-线性非静电装置。

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  • 来源
  • 会议地点 Hilton Head Island SC(US)
  • 作者

    Gang Li; N. R. Aluru;

  • 作者单位

    Beckman Institute for Advanced Science and Technology University of Illinois at Urbana-Champaign Urbana. IL 61801;

    Beckman Institute for Advanced Science and Technology University of Illinois at Urbana-Champaign Urbana. IL 61801 aluru@uiuc.edu;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 TM938.865;
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