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A LARGE-DEFLECTION ELECTROSTATIC ACTUATOR FOROPTICAL SWITCHING APPLICATIONS

机译：用于 r n光开关应用的大挠度静电致动器

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摘要

Fundamental improvements in the design of comb-drive actuatorsrnhave allowed their use in a 1xN optical switch requiringrn200 urn static deflection and a switching speed of less than 1 ms.rnThe main obstacle to the development of large-displacement combdrivernactuators has been electromechanical side instability, whichrnincreases with forward deflection and may cause catastrophic failure.rnIn this work, the stable deflection range is increased by employingrnprebent suspensions and linearly engaging comb teeth.rnNonlinear analytical models, as well as MechanicaTM finite elementrnmodels and SimulinkTM numerical models have been developedrnto fully characterize the performance of the actuators andrnfacilitate their design. A simple, high-yield, deep-reactive-ionetchingrnfabrication process has produced consistent performancernthat closely matches FEA and numerical models of the electrostaticrnactuators. Using separately-fabricated, highly-reflective mirrors,rnthe actuators have been utilized in a compact optical design thatrnfeatures high-speed, low optical-loss switching.
机译：梳齿驱动器设计的根本改进-允许将其用于需要200 urn静态偏转和小于1 ms的开关速度的1xN光开关中。大排量梳齿驱动器驱动器发展的主要障碍是机电侧不稳定性，这会增加在这项工作中，通过使用有效的悬架和线性啮合的梳齿来增加稳定的偏转范围.rn已经开发了非线性分析模型，MechanicaTM有限元模型和SimulinkTM数值模型以充分表征其性能。执行器并简化其设计。一个简单，高产量的深反应离子刻蚀制造工艺已产生了一致的性能，与FEA和静电致动器的数值模型非常匹配。通过使用单独制造的高反射镜，致动器已被用于具有高速，低光损耗切换功能的紧凑型光学设计中。

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