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首页> 外文会议>Solid-state sensor and actuator workshop : Technical digest >A VERTICAL MICROMACHINED RESISTIVE HEATERFOR A MICRO GAS SEPARATION COLUMN
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A VERTICAL MICROMACHINED RESISTIVE HEATERFOR A MICRO GAS SEPARATION COLUMN

机译：立式微机械电阻加热器，用于微气体分离塔

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This paper presents a micromachined vertical resistivernheater fabricated as part of a micro gas separation column. Therncomplete device is formed from two silicon die electrostaticallyrnbonded to a single glass die. The glass die is conventionallyrnmachined and contains four through holes. The holes are filledrnwith a zeolite adsorbent and thus act as separation columns.rnEach silicon die serves as a screen which allows air to flowrnthrough the device while holding the zeolite in place. Thern5000μm diameter screens are Deep Reactive Ion Etched (DRIE)rnand contain 1964 square 50μm × 50 × 350μm channels. Arnvertical resistor is also integrated onto one of the silicon die.rnThe junction isolated resistor is formed from a phosphorusrndiffusion which occurs after DRIE. Thus, the resistor isrnembedded into the walls of the micromachined silicon screen.rnThe vertical resistor is used to heat a purge gas and regeneraternthe zeolite adsorbent. The measured vertical resistance isrnbetween 6Ω and 7Ω. The residence time of the gas in the heaterrnis ～6Omsec assuming a 1SCCM N2 gas flow rate. Therntheoretical heat transfer coefficient is 3000W/m~2/℃. The powerrnconsumed to heat both the screen and the gas at steady state isrn～33mW/die.
机译：本文介绍了一种微机械立式电阻加热器，它是作为微型气体分离塔的一部分而制造的。完整的装置是由两个硅片静电粘合到一个玻璃模具上形成的。玻璃模具通常被加工并且包含四个通孔。孔中充满了沸石吸附剂，因此可以用作分离柱。每个硅芯片都可以用作筛网，使空气流过设备，同时将沸石固定在适当的位置。直径为5000μm的筛是深反应离子蚀刻（DRIE）筛，包含1964平方的50μm×50×350μm通道。 Arnvertical电阻器也集成到一个硅芯片上。结隔离电阻器是由DRIE之后发生的磷扩散形成的。因此，将电阻器嵌入微机械加工的硅筛的壁中。垂直电阻器用于加热吹扫气体并再生沸石吸附剂。测得的垂直电阻在6Ω至7Ω之间。假设气体流量为1SCCM N2，则气体在加热器中的停留时间约为6毫秒。理论传热系数为3000W / m〜2 /℃。稳态时，加热筛网和气体所消耗的功率为rn〜33mW / die。

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