• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Solid-state sensor and actuator workshop : Technical digest >HIGH SENSITIVITY MEMS ULTRASOUND ARRAYS BY LATERALFERROELECTRIC POLARIZATION
【24h】

HIGH SENSITIVITY MEMS ULTRASOUND ARRAYS BY LATERALFERROELECTRIC POLARIZATION

机译：横向 r n铁电极化的高灵敏度MEMS超声阵列

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This paper discusses the design of advanced micromachinedrnferroelectric ultrasound transducers for use at 3 MHz. 16 X 16rnarrays of resonant monomorph sensors have been constructed,rnwith sol-gel PZT as the active ferroelectric layer deposited onrninsulating layers of ZrO_2 and SiO_2. A novel in-plane polarizationrnof the PZT is used to maximize sensitivity, while trading offrnreduced output capacitance to match the CMOS bufferrnelectronics. This results in about 30 dB improved sensitivityrncompared to conventional polarizing across the thickness of thernPZT layer. Fluid-filled through wafer holes are used as anrnacoustic matching network to achieve resonance at both 1 and 3rnMHz. A lumped element equivalent circuit model is presented, asrnwell as Finite Element Analysis results. Performance predictionsrnfor projector efficiency and receive response are given. Testrnresults are presented including transmit response, receivernsensitivity, and frequency response.
机译：本文讨论了用于3 MHz的高级微机械铁电超声换能器的设计。利用溶胶-凝胶PZT作为沉积在ZrO_2和SiO_2绝缘层上的活性铁电层，构建了16 X 16个共振单晶型传感器阵列。 PZT的新型平面内极化用于最大化灵敏度，同时权衡降低的输出电容以匹配CMOS缓冲电子器件。与整个PrZT层厚度上的常规极化相比，这导致灵敏度提高了约30 dB。通过晶片孔填充的流体被用作环形声匹配网络，以实现1和3rnMHz的谐振。提出了集总元件等效电路模型，并给出了有限元分析结果。给出了投影机效率和接收响应的性能预测。测试结果包括发射响应，接收器灵敏度和频率响应。

著录项

  • 来源
  • 会议地点 Hilton Head Island SC(US)
  • 作者

    J.J. Bernstein; J. Bottari; K. Houston; G. Kirkos; R. Miller; B. Xu; Y. Ye; L.E. Cross;

  • 作者单位

    The Charles Stark Draper Laboratory, Cambridge MA 02139-3563;

    The Charles Stark Draper Laboratory, Cambridge MA 02139-3563;

    The Charles Stark Draper Laboratory, Cambridge MA 02139-3563;

    The Charles Stark Draper Laboratory, Cambridge MA 02139-3563;

    The Charles Stark Draper Laboratory, Cambridge MA 02139-3563;

    Materials Research Lab, Penn State University, University Park, PA 16802;

    Materials Research Lab, Penn State University, University Park, PA 16802;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 TM938.865;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号