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首页> 外文会议>Solid-state sensor and actuator workshop : Technical digest >Optimized Scratch Drive Actuator for TetheredNanometer Positioning of Chip-Sized Components
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Optimized Scratch Drive Actuator for TetheredNanometer Positioning of Chip-Sized Components

机译：优化的刮擦驱动执行器，用于芯片尺寸组件的系留/纳米级定位

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摘要

A novel surface micromachined robot, capable of pushing arn2x2x0.5 mm chip several millimeters while being powered by arngold wire tether is presented. The micro robot uses a uniquernassembly and packaging process and is created from large arraysrnof scratch drive actuators (SDA) tethered by gold wires bondedrnprior to release in an HF acid bath. The wire tether allows for robotrntransfer to other substrates and driving surfaces, where assemblyrnline positioning tasks can be performed. A device model has beenrnderived to define optimum SDA plate design for any fabricationrnprocess. The driving signal has also been optimized, consumingrnmuch less electrical power than previously published signals.rnBecause the step size of the individual SDA is approximately 30rnnanometers, the tethered SDA robots are expected to achievernsimilar placement precision for chip sized components. The SDArnrobot (Scratchuator) demonstrates the potential for low costrnnanometer positioning of chip sized components for alignment andrnflip chip assembly.
机译：提出了一种新颖的表面微加工机器人，该机器人能够将arn2x2x0.5 mm芯片推入数毫米，同时由arngold线绳供电。微型机器人采用独特的组装和包装工艺，由大型阵列，由金线束缚的刮擦驱动执行器（SDA）制成，并事先在HF酸浴中释放。钢丝绳可将机械手转移到其他基板和驱动表面，在此处可以执行装配线定位任务。推导了一种器件模型来定义任何制造过程的最佳SDA板设计。驱动信号也已进行了优化，比以前发布的信号消耗的电能少得多。由于单个SDA的步长约为30纳米，因此拴系SDA机器人有望实现与芯片大小的组件相似的放置精度。 SDArnrobot（Scratchuator）展示了对用于对准和倒装芯片组装的芯片尺寸组件进行低成本纳米定位的潜力。

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  • 来源
  • 会议地点 Hilton Head Island SC(US)
  • 作者

    Ryan J. Linderman; Victor M. Bright;

  • 作者单位

    NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical, and Digital Electronics University of Colorado at Boulder, CO 80309-0427;

    NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical, and Digital Electronics University of Colorado at Boulder, CO 80309-0427;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 TM938.865;
  • 关键词

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