Novel x-ray optics with Si wafers and formed glass

机译：具有硅晶片和成型玻璃的新型X射线光学器件

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The thermally formed thin glass foils and optically shaped Si wafers are considered to belong to the most promising technologies for future large space X-ray telescopes. We present and discuss the recent progress in these technologies, as well as properties of test mirrors produced and tested. For both technologies, both flat and curved samples have been produced and tested. The achieved profile accuracy is of order of 1 micrometer or better, while the bending technologies maintain the intrinsic fine surface microroughness of substrates (better than 0.5 nm for glass and around 0.1 nm for Si wafers).

机译：热成型的薄玻璃箔和光学形状的硅片被认为是未来大空间X射线望远镜最有希望的技术。我们介绍并讨论这些技术的最新进展，以及生产和测试的测试镜的性能。对于这两种技术，均已生产并测试了平坦和弯曲的样品。达到的轮廓精度约为1微米或更高，而弯曲技术可保持基板固有的精细表面微粗糙度（玻璃的粗糙度小于0.5 nm，硅晶片的粗糙度小于0.1 nm）。

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《Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray pt.1》|2006年|P.62661H.1-62661H.12|共12页
会议地点 OrlandoFL(US)
作者
R. Hudec; L. Pina; V. Semencova; A. Inneman; M. Skulinova; L. Sveda; M. Mika; V. Brozek; R. Kacerovsky; J. Prokop; J. Sik;
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Astronomical Institute, Academy of Sciences of the Czech Republic, 251 65 Ondrejov, Czech Republic;

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原文格式 PDF
正文语种 eng
中图分类天文光学望远镜;天文望远镜;
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1. Performance of assembled X-ray optics consisted of a polycapillary X-ray optics and a monocapillary X-ray optics for micro X-ray fluorescence spectrometry [J] . Spectrochimica Acta, Part B. Atomic Spectroscopy . 2020,第期

机译：组装X射线光学器件的性能由多谱X射线光学器件和用于微X射线荧光光谱法的单克罗特X射线光学器件组成
2. A high volume precision compression molding process of glass diffractive optics by use of a micromachined fused silica wafer mold and low T-g optical glass [J] . Yi AY, Chen Y, Klocke F, Journal of Micromechanics and Microengineering . 2006,第10期

机译：使用微机械熔融石英晶片模具和低T-g光学玻璃的玻璃衍射光学器件的大批量精密压缩成型工艺
3. AN X-RAY ABSORPTION STUDY OF DOPED SILICATE GLASS, FIBRE OPTIC PREFORMS [J] . Bowron DT., Rigden JS., Tarbox EJ., Journal of Materials Science . 1996,第2期

机译：掺杂硅酸盐玻璃，光纤预制棒的X射线吸收研究
4. Progress in X-ray optics development with formed glass and Si wafers [C] . R. Hudec, L. Pina, V. Semencova, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III; Proceedings of SPIE-The International Society for Optical Engineering; vol.6688 . 2007

机译：成型玻璃和硅晶片在X射线光学技术开发方面的进展
5. Thermal forming process for precision freeform optical mirrors and micro glass optics. [D] . Chen, Yang. 2010

机译：精密自由曲面光学镜和微玻璃光学器件的热成型工艺。
6. Perfect X-ray focusing via fitting corrective glasses to aberrated optics [O] . Frank Seiboth, Andreas Schropp, Maria Scholz, -1

机译：通过将矫正眼镜安装到像差光学元件上实现完美的X射线聚焦
7. Development of thermally formed glass optics for astronomical hard x-ray telescopes [O] . Craig William W., Hailey Charles J., Jimenez-Garate Mario, 2000

机译：用于天文硬X射线望远镜的热成型玻璃光学器件的开发
8. Phosphorus determination in borophosphosilicate or phosphosilicate glass films on a Si wafer by wavelength dispersive x-ray spectroscopy. [R] . Levine, H. S., Higgins, K. L. 1990

机译：通过波长色散x射线光谱法测定si晶片上的硼磷硅酸盐或磷硅酸盐玻璃膜中的磷。

Novel x-ray optics with Si wafers and formed glass

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