Synthesis of hard nitride coatings by ion beam assisted deposition

机译：离子束辅助沉积法合成硬质氮化物涂层

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Ion beam assisted deposition (IBAD) has been used to deposit chromium nitride coatings using 1200 eV nitrogen ions from an RF-tye ion source and thermally evaporated chromium. The ion/atom arrival ratio R was varied from 0 to 8 to modify the coating composition, microstructure, growth rate and stress state in order to optimize the properties of the material for use as a possible substitute for electroplated chromium in a number of anti-corrosion and tribological applications. The coatings were examined using Rutherford backscattering spectrometry and x-ray photoelectron spectroscopy, and contained up to 44 at

机译：离子束辅助沉积（IBAD）已用于使用来自RF轮胎离子源的1200 eV氮离子和热蒸发的铬来沉积氮化铬涂层。离子/原子的到达比R在0到8之间变化，以改变涂层的成分，微观结构，生长速率和应力状态，从而优化材料的性能，从而可以在许多抗腐蚀剂中替代电镀铬。腐蚀和摩擦学应用。使用Rutherford背散射光谱和X射线光电子能谱检查涂层，并在44°C时包含多达44个

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《Symposium on Atomistic Mechanisms in Beam Synthesis and Irradiation of Materials, held December 1-2, 1997, Boston, Massachusetts, U.S.A.》|1997年|p.271-276|共6页
会议地点 Boston MA(US)
作者
J.D.Demaree; C.G.Fountzoulas; J.K.Hirvonen; M.E.Monserrat; G.P.Halada; C.R.Clayton;
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正文语种 eng
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4. Synthesis of hard nitride coatings by ion beam assisted deposition [C] . J.D.Demaree, C.G.Fountzoulas, J.K.Hirvonen, Symposium on atomistic mechanisms in beam synthesis and irradiation of materials . 1998

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机译：通过反应和离子束辅助，电子束物理气相沉积（EB-PVD）合成和表征碳化钛，碳氮化钛硼，硼化钛/碳化钛和碳化钛/碳化铬多层涂层。
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机译：CdS / Cuinse2薄膜太阳能电池的氮氮化硅抗反射涂层通过电子束辅助化学气相沉积
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机译：使用离子束辅助反应蒸发在钒基板上沉积单层和梯度氮化铝涂层（ITER任务编号ETa-EC-BLR26）

Synthesis of hard nitride coatings by ion beam assisted deposition

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