首页> 外文会议>Symposium on Epitaxial Oxide Thin Films III March 31-April 2, 1997, San Francisco, California,U.S.A >AFM observations on the growth mechanisms of epitaxial perovskite oxide SrRuO_3 thin films
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AFM observations on the growth mechanisms of epitaxial perovskite oxide SrRuO_3 thin films

机译:外延钙钛矿氧化物SrRuO_3薄膜生长机理的AFM观察

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The growth mechanism and surface morphology of epitaxial SrRuO_3 thin films deposited on exact and vicinal (001) SrTiO_3 and exact (001) LaAlO-3 substrates has been studied. Vicinal substrates with miscut angle, alpha , up to 4 deg toward [010] direction were used. Atomic force microscope images show that the films grown on exact (001) SrTiO_3 substrate had a growth mechanism involving two dimensional nucleation. In contrast, characteristic step patterns were observed on the films deposited on vicinal substrates, suggesting that these films had a step flow growth mode. The films deposited on exact (001) LaAlO_3 substrates had a three dimensional island growth, due to the incoherence between the film and substrate lattice. These results were found to be consistent with the results of x-ray diffraction analysis of the in-plane domain structure.
机译:研究了在精确的和附近的(001)SrTiO_3和精确的(001)LaAlO-3衬底上沉积的外延SrRuO_3薄膜的生长机理和表面形貌。使用具有误切角α的朝向[010]方向最大为4度的邻近基材。原子力显微镜图像显示,在精确的(001)SrTiO_3衬底上生长的薄膜具有涉及二维成核的生长机理。相反,在邻近衬底上沉积的薄膜上观察到了特征性的阶梯图案,表明这些薄膜具有阶梯流动生长模式。由于薄膜和衬底晶格之间的不连贯性,在精确的(001)LaAlO_3衬底上沉积的薄膜具有三维岛状生长。发现这些结果与平面内畴结构的X射线衍射分析的结果一致。

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