Ion Beam Slicing of Single Crystal Oxide Thin Films

机译：单晶氧化物薄膜的离子束切片

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Epitaxial thin film liftoff using the ion-slicing method has been applied to SrTiO_3 single crystals. Rutherford backscattering spectrometry along with channeling (RBS/C) has been used to investigate the relative disorder as a function of temperature from the samples that were irradiated by 40 KeV hydrogen ions to a fluence of 5.0 X 10~(16) H~+/cm~2. Hydrogen profiles were also measured as a function of annealing temperature to understand the role of hydrogen in the ion slicing process. Film cleavage occurred during or after annealing at 570 K, and cleaved film has been successfully transferred to a silicon substrate using ceramic adhesive.

机译：使用离子切片法的外延薄膜剥离技术已应用于SrTiO_3单晶。 Rutherford背散射光谱法与通道法（RBS / C）一起用于研究40 KeV氢离子辐照至5.0 X 10〜（16）H〜+ /的通量的相对不规则随温度的变化厘米〜2。还测量了氢剖面作为退火温度的函数，以了解氢在离子切片过程中的作用。在570 K退火期间或之后发生膜裂解，并且已使用陶瓷粘合剂将裂解的膜成功转移到硅基板上。

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《Symposium on Ion Beam Synthesis and Processing of Advanced Materials held Nov 27-29, 2000, Boston, Massachusetts, U.S.A.》|2000年|p.6.2.1-6.2.6|共6页
会议地点 Boston MA(US);Boston MA(US)
作者
S. Thevuthasan; V. Shutthanandan; W. Jiang; W. J. Weber;
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Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory (PNNL), Richland, WA 99352;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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1. Transmission electron microscopy studies on structure and defects in crystalline yttria and lanthanum oxide thin films grown on single crystal sapphire by molecular beam synthesis [J] . Masaru Tsuchiyaa Nestor A. Bojarczukb Supratik Guhab Shriram Ramanathana* Philosophical Magazine . 2010,第9期

机译：透射电子显微镜研究分子束合成法在单晶蓝宝石上生长的氧化钇和氧化镧薄膜的结构和缺陷
2. Transmission electron microscopy studies on structure and defectsin crystalline yttria and lanthanum oxide thin films grown on singlecrystal sapphire by molecular beam synthesis [J] . Masaru Tsuchiya, Nestor A. Bojarczuk, Supratik Guha, Philosophical magazine: structure and properties of condensed matter . 2010,第9a10期

机译：透射电子显微镜研究分子束合成法在单晶蓝宝石上生长的晶体氧化钇和氧化镧薄膜的结构和缺陷
3. Single-crystalline Cu2O thin films of optical quality as obtained by the oxidation of single-crystal Cu thin films at low temperature [J] . Taewoo Ha, Inhee Park, Kyung Ik Sim, APL Materials . 2019,第3期

机译：通过在低温下氧化单晶Cu薄膜获得的光学品质的单晶Cu2O薄膜
4. Ion Beam Slicing of Single Crystal Oxide Thin Films [C] . W. J. Weber, W. Jiang, V. Shutthanandan, Materials Research Society Symposium . 2001

机译：单晶氧化物薄膜离子束切割
5. Crystal ion slicing of single crystal thin films for optical and electrical applications. [D] . Izuhara, Tomoyuki. 2004

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6. A Fast Route Towards Freestanding Single-Crystalline Oxide Thin Films by Using YBa2Cu3O7-x as a Sacrificial Layer [O] . Yao-Wen Chang, Ping-Chun Wu, Jhih-Bang Yi, 2020

机译：通过使用YBA2Cu3O7-X作为牺牲层通过使用YBA2Cu3O7-X自由晶体氧化物薄膜的快速路线
7. Single-crystalline Cu2O thin films of optical quality as obtained by the oxidation of single-crystal Cu thin films at low temperature [O] . Taewoo Ha, Inhee Park, Kyung Ik Sim, 2019

机译：通过在低温下通过单晶Cu薄膜氧化获得的光学质量的单晶Cu2O薄膜
8. Thin films of metal oxides on metal single crystals: Structure and growth by scanning tunneling microscopy [R] . Galloway, H. C. 1995

机译：金属单晶上的金属氧化物薄膜：通过扫描隧道显微镜观察结构和生长

Ion Beam Slicing of Single Crystal Oxide Thin Films

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