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首页> 外文会议>Symposium on Ion Beam Synthesis and Processing of Advanced Materials held Nov 27-29, 2000, Boston, Massachusetts, U.S.A. >Evolution of Ion Beam Synthesized Au Nanoclusters in SiO2 under Ion Irradiation
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Evolution of Ion Beam Synthesized Au Nanoclusters in SiO2 under Ion Irradiation

机译：离子辐照下SiO 2中离子束合成的金纳米团簇的演化

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摘要

The evolution of the mean size and the size distribution of Au nanoclusters (NCs) under high-energy ion irradiation has been studied. Au NCs were synthesized in a 480 nm thick SiO_2 layer by 330 keV Au~+ implantation and subsequent annealing at T = 1000 ℃ for 1h in dry O_2. XTEM images show a 70 nm thick layer of Au NCs, being centered at the projected ion range R_p(330keV) = 100 nm, having a mean NC size of 5 nm at R_p, and resembling the broad Lifshiz-Slyozov-Wagner (LSW) size distribution of diffusion controlled Ostwald ripening. Post-irradiation of the Au NCs by 4.5 MeV gold ions was used in order to tailor their size and size distribution. The high-energy Au~+ irradiations were performed at 190...210 ℃ with a fluence of (0.5...1.0)xl0~(16) cm~(-2). By the post-irradiation no gold was deposited into the SiO_2 layer, the Au~+ ions come to rest in the (00l)Si substrate at R_p(4.5MeV) = 1μm. XTEM images of the post-irradiated Au NCs show a strong decrease of their mean size as well as the width of their size distribution. The observed NC evolution under ion irradiation agrees with recent theoretical predictions and kinetic Monte-Carlo simulations.
机译：研究了高能离子辐照下金纳米团簇（NCs）的平均尺寸和尺寸分布的演变。通过330 keV Au〜+注入在480 nm厚的SiO_2层中合成Au NCs，然后在干燥的O_2中于T = 1000℃退火1h。 XTEM图像显示了70 nm厚的Au NCs层，其中心位于投影离子范围R_p（330keV）= 100 nm，R_p处的NC平均大小为5 nm，类似于宽Lifshiz-Slyozov-Wagner（LSW）扩散控制的奥斯特瓦尔德熟化的粒径分布。使用4.5 MeV金离子对Au NCs进行后照射，以调整其尺寸和尺寸分布。高能Au〜+辐射在190 ... 210℃下进行，通量为（0.5 ... 1.0）x10〜（16）cm〜（-2）。通过后辐照，没有金沉积在SiO_2层中，Au〜+离子以R_p（4.5MeV）=1μm停留在（00l）Si衬底中。辐照后的Au NCs的XTEM图像显示其平均尺寸以及尺寸分布的宽度都大大减小。在离子辐照下观察到的NC演变与最近的理论预测和动力学蒙特卡洛模拟相吻合。

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