New progress on p-type macroporous silicon electrodissolution

机译：p型大孔硅电溶的新进展

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We discuss fabrication of macroporous structures, both random and periodical, on p-type silicon samples by electrochemical etching using aqueous and organic electrolytes. We have obtained different lattice structures starting from an unique lithographic mask. Organic compounds used in this work were Dimethylformamide (DMF) and Dimethylsulfoxide (DMSO).

机译：我们讨论了通过使用水和有机电解质的电化学蚀刻在p型硅样品上制造大孔结构（随机和周期性）的方法。我们从独特的光刻掩模开始获得了不同的晶格结构。用于这项工作的有机化合物是二甲基甲酰胺（DMF）和二甲基亚砜（DMSO）。

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《Symposium on Materials and Devices for Optoelectronics and Microphotonics, Apr 1-5, 2002, San Francisco, California》|2002年|p.449-454|共6页
会议地点 San Francisco CA(US);San Francisco CA(US)
作者
Paolo Bettotti; Zeno Gaburro; Luca Dal Negro; Lorenzo Pavesi;
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作者单位

INFM and Department of Physics, University of Trento Povo (TN), ITALY;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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3. Pore size modulation in electrochemically etched macroporous p-type silicon monitored by FFT impedance spectroscopy and Raman scattering [J] . Enrique Quiroga-Gonzalez, Jurgen Carstensen, Colm Glynn Physical chemistry chemical physics: PCCP . 2014,第1期

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4. New progress on p-type macroporous silicon electrodissolution [C] . Paolo Bettotti, Zeno Gaburro, Lucal Dal Negro, Materials Research Society Symposium . 2002

机译：P型大孔硅电极溶液的新进展
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New progress on p-type macroporous silicon electrodissolution

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