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首页> 外文会议>Symposium on Materials and Devices for Optoelectronics and Microphotonics, Apr 1-5, 2002, San Francisco, California >FREQUENCY SELECTIVE SURFACES ENABLE MEMS GAS SENSOR
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FREQUENCY SELECTIVE SURFACES ENABLE MEMS GAS SENSOR

机译：频率选择表面可启用MEMS气体传感器

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摘要

We have developed a thermally stimulated narrow-band infrared source for sensing, spectroscopy and thermophotovoltaic applications by combining the unique advantages of two different structures: a photonic crystal that consists of an array of holes etched into a dielectric substrate and a periodically perforated metallic thin film. The dielectric photonic crystal structure is passive and exhibits a strong absorption at resonance. This acts as a radiation reservoir for the conductive array, which plays an active role through plasmon interactions and is opaque at all wavelengths except those at which coupling occurs. We have fabricated the arrays on silicon, silicon dioxide and silicon nitride substrates using MEMS-based processing methods. Infrared spectroscopic studies were used to characterize reflection, absorption and emission in the 2 to 14 micron range showing narrow band resonance. Spectral tuning was accomplished by controlling symmetry and lattice spacing of the arrays. The effects of the etch depth, metal and dielectric properties have been studied experimentally and theoretically. These structures have been used as an emitter/detector sensor chip to selectively detect industrial pollutants like carbon dioxide.
机译：通过结合两种不同结构的独特优势，我们开发了一种用于传感，光谱学和热光电应用的热激发窄带红外光源：两种结构的光子晶体由蚀刻到介电基板中的孔阵列组成，并具有周期性穿孔的金属薄膜。介电光子晶体结构是无源的，并且在共振时表现出强吸收。它充当导电阵列的辐射库，它通过等离激元相互作用发挥积极作用，并且在所有波长（发生耦合的波长除外）下都是不透明的。我们已经使用基于MEMS的处理方法在硅，二氧化硅和氮化硅衬底上制造了阵列。红外光谱研究用于表征2到14微米范围内的反射，吸收和发射，显示出窄带共振。通过控制阵列的对称性和晶格间距来完成光谱调谐。通过实验和理论研究了蚀刻深度，金属和介电性能的影响。这些结构已用作发射器/检测器传感器芯片，以选择性地检测工业污染物，例如二氧化碳。

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