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Leds based on oxidized porous polysilicon on a transparent substrate

机译:在透明基板上基于氧化多孔多晶硅的LED

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摘要

Light emitting devices (LEDs) based on porous polysilicon (PPS) have been fabricated on a transparent quartz substrate. Several structures have been developed, each consisting of a backside contact (ITO or p~+ polysilicon), a light emitting PPS layer, a capping layer, and a metal top contact. Photoluminescence (PL) from PPS is similar to that of etched crystalline Si, peaking near 750 nm and showing degradation during 515 nm laser excitation with intensity <100 mW/cm~2. This degradation disappears if PPS is oxidized after formation. Visible electroluminescence (EL) has been achieved in both oxidized and non-oxidized PPS devices with voltages under 10 V and current densities <200 mA/cm~2.
机译:已经在透明石英基板上制造了基于多孔多晶硅(PPS)的发光器件(LED)。已经开发了几种结构,每个结构包括背面触点(ITO或p +多晶硅),发光PPS层,覆盖层和金属顶部触点。 PPS的光致发光(PL)与蚀刻的晶体Si相似,在750 nm处达到峰值,并在515 nm的激光激发下强度<100 mW / cm〜2下降。如果PPS在形成后被氧化,则这种降解消失。在电压低于10 V且电流密度<200 mA / cm〜2的氧化型和非氧化型PPS器件中均实现了可见电致发光(EL)。

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