首页> 外文会议>Symposium on Optical Microstructural Characterization of Semiconductors held November 29-30, 1999, Boston, Massachusetts, U.S.A. >Development of low energy cathodoluminescence system and its application to the study of ZnO powders
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Development of low energy cathodoluminescence system and its application to the study of ZnO powders

机译:低能阴极发光系统的发展及其在ZnO粉体研究中的应用

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We have developed a cathodoluminescence (CL) system with high spatial resolution using a thermal-field emission gun operating with low electron beam energies. SInce the electron range is proportional to the 1.7 th power of the electron beam energy, operation with a lw energy electron beam strongly reduces the probe size of CL. Luminescence property of ZnO tetrapods was studied with this system. High spatial rsolution better than 100 nm was achieved when it was operated with a beam energy less than 3keV. The variation of Cl spectra along one leg of tetrapod was recorded. The ratio of the ultraviolet emission to the visible luminescence at the center of tetrapod was different from theose of the points along the arm, suggesting that the center of tetrapod is much defective compared with the arms. We also observed a decrase of CL intensity during observation. Possible degreadation mechanisms were discussed.
机译:我们已经开发了一种使用低电子束能量的热场发射枪来开发具有高空间分辨率的阴极发光(CL)系统。由于电子范围与电子束能量的1.​​7次方成正比,因此以低能量电子束进行操作会大大减小CL的探头尺寸。用该系统研究了ZnO四足动物的发光特性。当光束能量小于3keV时,可获得高于100 nm的高空间分辨率。记录了沿四脚架的一条腿的Cl光谱的变化。四脚架中心的紫外线发射与可见光的比率与沿手臂的点的位置有所不同,这表明四脚架的中心与手臂相比有很多缺陷。在观察过程中,我们还观察到了CL强度的降低。讨论了可能的反读取机制。

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