首页> 外文会议>Symposium on Optoelectronics of Group-IV-Based Materials; 20030421-20030424; San Francisco,CA; US >The Nd-nanocluster coupling strength and its effect in excitation/de-excitation of Nd~(3+) luminescence in Nd-doped silicon-rich silicon oxide
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The Nd-nanocluster coupling strength and its effect in excitation/de-excitation of Nd~(3+) luminescence in Nd-doped silicon-rich silicon oxide

机译:Nd掺杂富硅氧化硅中Nd-纳米簇的耦合强度及其在Nd〜(3+)发光激发/去激发中的作用

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摘要

The Nd-nanocluster Si (nc-Si) coupling strength and its effect in excitation/de-excitation of Nd~(3+) luminescence in Nd-doped silicon-rich silicon oxide (SRSO) is investigated. Nd-doped SRSO thin films, which consist of nc-Si embedded inside a SiO_2 matrix, were prepared by electron-cyclotron-resonance plasma enhanced chemical vapor deposition (ECR-PECVD) of SiH_4 and O_2 with co-sputtering of Nd and subsequent anneal at 950℃. Efficient Nd~(3+) luminescence with moderate temperature quenching is observed. Based on the temperature dependence of Nd~(3+) luminescence lifetime, a coupling strength between nc-Si and Nd that is strong enough to result in efficient excitation of Nd~(3+) via quantum confined excitons while weak enough to result in a small back-transfer rate is identified as the key to Nd~(3+) luminescence.
机译:研究了Nd掺杂富硅氧化硅(SRSO)中Nd-纳米簇Si(nc-Si)的耦合强度及其在Nd〜(3+)发光激发/去激中的作用。通过SiH_4和O_2的电子回旋共振等离子体增强化学气相沉积(ECR-PECVD),以及Nd的共溅射和随后的退火,制备了Nd掺杂的SRSO薄膜,该薄膜由嵌入SiO_2基体内的nc-Si组成。在950℃。观察到Nd〜(3+)发光具有适度的温度猝灭。基于Nd〜(3+)发光寿命的温度依赖性,nc-Si和Nd之间的耦合强度足够强,可以通过量子约束激子有效激发Nd〜(3+),而足够弱,可以导致较小的反向传输速率被认为是Nd〜(3+)发光的关键。

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