Electron Microscopy of the Operation of Nanoscale Devices

机译：纳米器件操作的电子显微镜

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A transmission electron microscope (TEM) is much more than just a tool for imaging the static state of materials. To demonstrate this, we present work on studying the mechanical and electrical properties of carbon nanotube devices. Multiwall carbon nanotubes are concentrically stacked tubular sheets of graphite, where the spacing between each cylinder is simply the natural spacing of graphite. Using a custom-built in-situ nanomanipulation probe, we have shown that it is possible to slide the nanotube layers in a telescopic extension mode that exhibits low friction, demonstrating the potential of nanotubes as the ultimate synthetic nanobearing. During this telescopic extension, the electrical resistance of the nanotube devices increases, opening the possibility that these devices can also be used as nanoscale rheostats. We also briefly describe work on using electron holography inside a TEM to study the electric field distribution in nanotube field-emission devices and on using a nanotube itself as a biprism for electron holography. These measurements together demonstrate the wealth of information that can be obtained and frontiers that can be opened by putting operational nanodevices inside an electron microscope.

机译：透射电子显微镜（TEM）不仅仅是用于对材料静态成像的工具。为了证明这一点，我们目前正在研究碳纳米管器件的机械和电气性能。多壁碳纳米管是同心堆叠的管状石墨片，其中每个圆柱体之间的间距只是石墨的自然间距。使用定制的原位纳米操作探针，我们已经表明可以以伸缩式延伸方式滑动纳米管层，该方式表现出低摩擦力，证明了纳米管作为最终合成纳米轴承的潜力。在这种伸缩延伸期间，纳米管装置的电阻增加，从而打开了将这些装置也用作纳米级变阻器的可能性。我们还简要介绍了在TEM中使用电子全息术研究纳米管场发射器件中的电场分布以及将纳米管本身用作电子全息术的双棱镜的工作。这些测量结果共同证明了可以通过将可操作的纳米设备放入电子显微镜内而获得的大量信息以及可以打开的前沿领域。

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《Symposium Proceedings vol.839; Symposium on Electron Microscopy of Molecular and Atom-Scale Mechanical Behavior, Chemistry and Structure; 20041129-1201; Boston,MA(US)》|2004年|P.165-176|共12页
会议地点 BostonMA(US)
作者
John Cumings; David Goldhaber-Gordon; A. Zettl; MR. McCartney; J. C. H. Spence;
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Department of Physics, Stanford University, Stanford, California;

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原文格式 PDF
正文语种 eng
中图分类半导体技术;
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2. Atomic force microscopy (AFM), transmission electron microscopy (TEM) and scanning electron microscopy (SEM) of nanoscale plate-shaped second phase particles [J] . Sobchenko I, Pesicka J, Baither D, Philosophical magazine: structure and properties of condensed matter . 2007,第16a17期

机译：纳米级板状第二相颗粒的原子力显微镜（AFM），透射电子显微镜（TEM）和扫描电子显微镜（SEM）
3. Development of atomic force microscopy combined with scanning electron microscopy for investigating electronic devices [J] . Takeshi Uruma, Chiaki Tsunemitsu, Katsuki Terao, AIP Advances . 2019,第11期

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4. Electron Microscopy of the Operation of Nanoscale Devices [C] . John Cumings, David Goldhaber-Gordon, A.Zettl, Symposium on Electron Microscopy of Molecular and Atom-Scale Mechanical Behavior, Chemistry and Structure . 2005

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5. Electron Microscopy Characterization of GaN-on-GaN Vertical Power Devices =Electron Microscopy Characterization of GaN-on-GaN Vertical Power Devices [D] . Peri, Prudhvi Ram. 2021

机译：GaN-On-GaN垂直功率器件的电子显微镜表征= GaN-On-GaN垂直功率器件的电子显微镜表征
6. Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices [O] . Amelie Axt, Ilka M Hermes, Victor W Bergmann, 2018

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7. Electron Microscopy of the Operation of Nanoscale Devices [O] . John Cumings, David Goldhaber-gordon, A. Zettl, 2014

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8. Operation and Fabrication of Single Electron and Coherent Nanoscale Semiconductor Devices [R] . Sturm, J. C. 2004

机译：单电子和相干纳米半导体器件的操作和制作

Electron Microscopy of the Operation of Nanoscale Devices

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