首页> 外文会议>Symposium on In Situ Process Diagnostics and Intelligent Materials Processing held December 2-5, 1997, Boston, Massachusetts, U.S.A. >In-situ characterization of laser deposited Fe/Ag multilayers by a combination of time-of-flight, rheed and resistance measurements
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In-situ characterization of laser deposited Fe/Ag multilayers by a combination of time-of-flight, rheed and resistance measurements

机译:通过飞行时间,流变和电阻测量的组合,对激光沉积的Fe / Ag多层膜进行原位表征

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摘要

Fe/Ag multilayers, prepared by pulsed laser deposition (PLD) using KrF radiation, were characterized in-situ by RHEED (diffraction of high energetic electrons) and resistance measurements during deposition, and by X-ray diffraction after deposition. While the x-ray diffraction experiments give indications for sharp interfaces, the in-situ investigations clearly show an asymmetry of the structural behaviors at the interfaces and mixing effects on a nm scale, especially as soon as Fe is deposited on Ag. Time-of-flight (TOF) measurements performed with a Faraday cup show that during PLD in ultrahigh vacuum ions are deposited with kinetic energies of more than 100 eV. The results are modeled and discussed with respect to implantation and mixing effects due to the high kinetic energy of the deposited particles during PLD.
机译:通过使用KrF辐射通过脉冲激光沉积(PLD)制备的Fe / Ag多层膜,在沉积过程中通过RHEED(高能电子的衍射)和电阻测量以及沉积后的X射线衍射进行了现场表征。尽管X射线衍射实验表明存在尖锐的界面,但原位研究清楚地显示出界面处的结构行为和纳米级混合效应的不对称性,特别是一旦Fe沉积在Ag上。用法拉第杯进行的飞行时间(TOF)测量表明,在PLD期间,超高真空中的离子沉积时的动能超过100 eV。由于在PLD期间沉积的粒子具有很高的动能,因此针对注入和混合效应对结果进行了建模和讨论。

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