Photo-assisted anodic etching of GaN films in NaOH electrolyte with Cl ions

机译：含Cl离子的NaOH电解质中的GaN膜光辅助阳极蚀刻

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Photo-assisted anodic etching of high quality n-GaN films grown by metalorganic chemical vapour deposition (MOCVD) on sapphire substrate using sodium hydroxide (NaOH) electrolyte at room temperature is reported. It is found that the presence of chloride ions in the NaOH electrolyte accelerates the rate of photo-assisted anodic etching of GaN films. The effect of adding chloride ions in the NaOH electrolyte is to reduce the extent of the formation of gallium oxide layer on the surface. It seems that the presence of chloride ions in the NaOH electrolyte plays an important role in the photo-assisted anodic etching of n-GaN films.

机译：报道了在室温下使用氢氧化钠（NaOH）电解质在蓝宝石衬底上通过金属有机化学气相沉积（MOCVD）生长的高质量n-GaN膜的光辅助阳极蚀刻。发现在NaOH电解质中氯离子的存在加速了GaN膜的光辅助阳极蚀刻的速率。在NaOH电解液中添加氯离子的作用是减少表面上氧化镓层的形成程度。看来NaOH电解质中氯离子的存在在n-GaN膜的光辅助阳极蚀刻中起着重要作用。

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来源
《Symposiuml on Nitrides and Related Wide Band Gap Materials of the E-MRS 1998 Spring Conference, Strasbourg, France,16-19 June 1998》|1998年|p.355-357|共3页
会议地点 Strasbourg(FR)
作者
Mitsugu Ohkubo;
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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
GaN; NaOH; Cl ions; Anodic etching; Ultraviolet; Gallium oxide;

机译：氮化镓;氢氧化钠; Cl离子；阳极蚀刻；紫外线;氧化镓;

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3. Simple wet-etching technology for GaN using an electrodeless photo-assisted electrochemical reaction with a luminous array film as the UV source [J] . Horikiri Fumimasa, Fukuhara Noboru, Ohta Hiroshi, Applied physics express . 2019,第3期

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4. Photo-assisted anodic etching of GaN films in NaOH electrolyte with Cl ions [C] . Mitsugu Ohkubo, European Materials Research Society Symposium L on nitrides and related wide band gap materials of the E-MRS conference . 1999

机译：NaOH电解质的PhaI辅助阳极蚀刻与CL离子
5. THE EFFECTS OF ANODIZING ELECTROLYTE AND TEMPERATURE ON THE STRUCTURE AND COMPOSITION OF ANODIC OXIDE FILMS ON ALUMINUM. [D] . FLORIO, STEVEN MICHAEL. 1985

机译：阳极氧化和温度对铝阳极氧化膜结构和组成的影响。
6. Nanorods on surface of GaN-based thin-film LEDs deposited by post-annealing after photo-assisted chemical etching [O] . Lung-Chien Chen, Wun-Wei Lin, Te-Yu Liu 2017

机译：光辅助化学蚀刻后通过退火沉积的GaN基薄膜LED表面的纳米棒
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Photo-assisted anodic etching of GaN films in NaOH electrolyte with Cl ions

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