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Epitaxial Growth of Ferroelectric Pb(Zr,Ti)O_3 Layers on GaAs

机译:GaAs上铁电Pb(Zr,Ti)O_3层的外延生长

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摘要

Ferroelectric epitaxial Pb(Zr,Ti)O_3 (PZT) layers were grown by pulsed laser deposition on SrTiO_3/GaAs templates fabricated by molecular beam epitaxy. The templates present an excellent structural quality and the SrTiO_3V/GaAs is abrupt at the atomic scale thanks to surface Ti pre-treatment. The PZT layers contain a- and c- domains, as shown by X-Ray diffraction analyses. Piezoforce microscopy experiments and macroscopic electrical characterizations indicate that PZT is ferroelectric. A relative dielectric permittivity of 164 is extracted from these measurements.
机译:通过脉冲激光沉积在分子束外延制备的SrTiO_3 / GaAs模板上生长铁电外延Pb(Zr,Ti)O_3(PZT)层。模板具有出色的结构质量,并且由于表面Ti的预处理,SrTiO_3V / GaAs在原子尺度上突然出现。 X射线衍射分析显示,PZT层包含a和c域。压电力显微镜实验和宏观电学特性表明PZT是铁电体。从这些测量中得出相对介电常数为164。

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