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Design issues of two-dimensional amorphous silicon position-sensitive detectors

机译：二维非晶硅位置敏感探测器的设计问题

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The two-dimensional amorphous silicon position-sensitive detector (PSD) is usually in the form of large-area, continuous p-i-n silicon layer structure coupled with resistive layers next to the p and n Si layers. The device has many applications (e.g.light position measurements, light-pen input devices, etc.) and can be fabricated by using low-cost PECVD process. When used as a light-pen-based input device, several material-related design issues must be critically considered for ahieving acceptable performance. The present work addresses three important issues, namely the spectral response of PSD, the uniformity requirement of the resistive layers, and the design of optical filter on the input side of PSD. They correspond to the signal-to-noise ratio of the device, the accuracy of light-position determination, and the integration problem with liquid crystal displays (LCD), respectively. Analytical analysis and computer simulation results draw the following important conclusions: (1) red-light-sensitive PSD can be obtained by properly tuning the thickness of p-layer and i-layer, which suppress the interference of background light when using the input device under sun light-position determination, and the integration problem with liquid crystal displays (LCD), respectively. Analytical analysis and computer simulation results draw the following important conclusions: (1) red-light-sensitive PSD can be obtained by properly tuning the thickness of p-layer and i-layer, which suppress the interference of background light when using the input device under sun light or similar illumination (2) the spot size of input light has little effect on position determination, as long as the size does not differ too much from that of required resolution. And a conservative uniformity requirement for the resistive layers can be obtained as |#DELTA#h/h|<=4 with n being the required number of pixels of display and h being the film thickness (3) multi-layered filters made of oxides can be deposited on PSD to reflect non-signal light for LCD display while preservingthe input-signal when the PSD is placed under a TN LCD. direct c 1999 Published by Elsevier Science S.A. All rights reserved.
机译：二维非晶硅位置敏感检测器（PSD）通常采用大面积，连续的p-i-n硅层结构，并与紧邻p和n硅层的电阻层耦合。该设备具有许多应用（例如，光位置测量，光笔输入设备等），可以通过使用低成本PECVD工艺来制造。当用作基于光笔的输入设备时，为了获得可接受的性能，必须严格考虑一些与材料有关的设计问题。目前的工作解决了三个重要问题，即PSD的光谱响应，电阻层的均匀性要求以及PSD输入侧的光学滤波器的设计。它们分别对应于设备的信噪比，光位置确定的精度以及液晶显示器（LCD）的集成问题。分析分析和计算机仿真结果得出以下重要结论：（1）可以通过适当调整p层和i层的厚度来获得对红光敏感的PSD，从而抑制了使用输入设备时背景光的干扰。在阳光下确定位置，以及与液晶显示器（LCD）的集成问题。分析分析和计算机仿真结果得出以下重要结论：（1）可以通过适当调整p层和i层的厚度来获得对红光敏感的PSD，从而抑制了使用输入设备时背景光的干扰。在太阳光或类似的照明条件下（2），只要入射光的光斑尺寸与所需分辨率的差异不大，对位置确定的影响就很小。电阻层的保守均匀性要求可以通过|＃DELTA＃h / h | <= 4 / n来获得，其中n是显示的所需像素数，h是膜厚（3）当PSD放置在TN LCD下方时，可以在PSD上沉积60％的氧化物以反射非信号光以供LCD显示，同时保留输入信号。直接c 1999由Elsevier Science S.A.出版，保留所有权利。

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