• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Thin film materials for large area electronics >Low temperature silicon deposition for large area sensors and solar cells
【24h】

Low temperature silicon deposition for large area sensors and solar cells

机译：适用于大面积传感器和太阳能电池的低温硅沉积

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Low temperature deposition methods are needed for realizing large area electronics on alternative substrates like glass, polymer or steel foils. Reasonable electronic quality of low temperature deposited silicon, however, can only be achieved by employing additional, non-thermal sources of energy for promoting and optimizing the surface controlled silicon growth. Methods like very high frequency glow discharge or hot-wire chemical vapour deposition provide a wide range of control over the deposition process, enabling high growth rates, amorphous as well as crystalline silicon deposition and effective hydrogen etching. The current status of these deposition methods is reviewed and the resulting material properties are discussed. Applications like two-terminal colour sensorsand photodiodes for retina implantation demonstrate the potential of joining amorphous and crystalline silicon technology into hybrid sensor systems and teach us how to use the building blocks for novel large area electronics. direct c 1999 Elsevier Science S.A. All rights reserved.
机译：需要低温沉积方法以在诸如玻璃，聚合物或钢箔的替代基板上实现大面积电子设备。然而，只有通过采用额外的非热能源来促进和优化表面可控硅的生长，才能实现低温沉积硅的合理电子质量。诸如极高频辉光放电或热线化学气相沉积之类的方法可提供对沉积过程的广泛控制，从而实现高生长速率，非晶硅以及晶体硅沉积以及有效的氢蚀刻。回顾了这些沉积方法的现状，并讨论了所得的材料性能。诸如用于视网膜植入的两端子彩色传感器和光电二极管之类的应用证明了将非晶硅和晶体硅技术结合到混合传感器系统中的潜力，并教会了我们如何将构建基块用于新型大面积电子设备。直接c 1999 Elsevier Science S.A.保留所有权利。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号