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Fabrication and electrical properties of sol-gel derived (BaSr)TiO_3 thin films with metallic LaNiO_3 electrode

机译:具有金属LaNiO_3电极的溶胶凝胶衍生(BaSr)TiO_3薄膜的制备和电学性能

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摘要

Metallic LaNiO_3 (LNO) films were prepared on LaAlO_3 (LAO) and Si substrates by metal-organic decomposition (MOD) and their application as the bottom electrode for sol-gel derived (BaSr)TiO_3 (BST) thin films was studied. X-ray diffraction, atomic force microscope and electrical measurements were used to characterize the multilayer films of BST/LNO/substrates. BST film on LNO-coated LAO substrate exhibited preferred (100) orientation. Smooth and dense surface with fine grains (approx50nm) was observed. The electrical measurement results on BST films using LNO and stainless steel as the bottom electrodes, respectively, showed BST/LNO/substrates have higher dielectric constant, lower loss tangent, lower leakage current and higher breakdown voltage.
机译:通过金属有机分解(MOD)在LaAlO_3(LAO)和Si衬底上制备了金属LaNiO_3(LNO)膜,并研究了其作为溶胶凝胶衍生的(BaSr)TiO_3(BST)薄膜的底部电极的应用。用X射线衍射,原子力显微镜和电学测量来表征BST / LNO /基底的多层膜。 LNO涂层的LAO基材上的BST膜表现出优选的(100)方向。观察到具有细晶粒(约50nm)的光滑且致密的表面。以LNO和不锈钢为底电极的BST薄膜的电学测量结果分别表明BST / LNO /基板具有较高的介电常数,较低的损耗角正切,较低的漏电流和较高的击穿电压。

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