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TEM and AFM study of perovskite conductive LaNiO_3 films prepared by metalorganic decomposition

机译：金属有机分解法制备钙钛矿型导电LaNiO_3薄膜的TEM和AFM研究

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Perovskite conductive LaNiO_3 (LNO) films were prepared by metalorganic decomposition. The films were obtained by spin-on pyrolysis on NaCl and SrTiO_3(STO) substrates and then annealing at various temperature. The effect of different thermal treatments and annealing temperature on crystallinity, orientation and surface morphology of LNO films was studied. The results obtained by transmission electron microscopy (TEM), selected area electron diffraction (SAED) and X-ray photoelectron spectrometry (XPS) indicated that in the thermal treatment process the oxygen diffusion into the film is the critical step in the fabrication of good metallic LNO films at lower growth temperature. Epitaxial LNO films could be fabricated on STO. The surface morphology of LNO film on StO including the film roughness was recorded by atomic force microscopy (AFM).
机译：通过金属有机分解制备了钙钛矿型导电LaNiO_3（LNO）薄膜。通过在NaCl和SrTiO_3（STO）衬底上旋转热解然后在不同温度下退火来获得薄膜。研究了不同热处理和退火温度对LNO薄膜结晶度，取向和表面形貌的影响。通过透射电子显微镜（TEM），选择区域电子衍射（SAED）和X射线光电子能谱（XPS）获得的结果表明，在热处理过程中，氧扩散到薄膜中是制造优质金属的关键步骤。 LNO膜在较低的生长温度下。可以在STO上制造外延LNO膜。用原子力显微镜（AFM）记录了StO上LNO膜的表面形貌，包括膜的粗糙度。

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