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首页> 外文会议>Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XIII; Progress in Biomedical Optics and Imaging; vol.7 no.13 >Multi-wavelength phase imaging interference microscopy
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Multi-wavelength phase imaging interference microscopy

机译：多波长相位成像干涉显微镜

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摘要

Multi-wavelength phase imaging interferography is a technique that combines phase-shifting interferometry with multi-wavelength phase unwrapping. It can be used to obtain phase profile of an object without 2π ambiguities inherent to single wavelength phase images. In this technique, a Michelson-type interferometer is illuminated by an LED and the reference mirror is dithered for obtaining interference images at four phase quadratures, which are combined to calculate the phase of the object surface. The 2π discontinuities are removed by repeating the experiment using two or three LEDs at different wavelengths, which yields phase images of effective wavelength much longer than the original. The resulting image is a profile of the object surface with a height range of several microns and noise levels of 10's of nm. The technique is applied to imaging of phase profile of microscopic objects. The interferographic images using broadband source are significantly less affected by coherent noise, and there are a number of other advantages, such as lower cost and ease of operation.
机译：多波长相位成像干涉术是将相移干涉术与多波长相位解缠相结合的技术。它可以用于获得物体的相位分布，而没有单波长相位图像固有的2π模糊性。在这种技术中，迈克尔逊型干涉仪由LED照明，并且对参考镜进行抖动处理，以获得四个相位正交的干涉图像，这些图像被组合起来以计算物体表面的相位。通过使用两个或三个不同波长的LED重复实验，可以消除2π不连续性，从而产生有效波长的相位图像要比原始波长长得多。生成的图像是物体表面的轮廓，高度范围为几微米，噪声级别为10纳米。该技术被应用于微观物体的相位轮廓成像。使用宽带光源的干涉图图像受相干噪声的影响要小得多，并且还有许多其他优点，例如较低的成本和易于操作。

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