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首页> 外文会议>TMS(The Minerals, Metals amp; Materials Society) Annual Meeting; 20050213-17; San Francisco, CA(US) >MICROSTRUCTURES AND FERROELECTRIC PROPERTIES OF BARIUM STRONTIUM TITANATE THIN FILMS
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MICROSTRUCTURES AND FERROELECTRIC PROPERTIES OF BARIUM STRONTIUM TITANATE THIN FILMS

机译：钛酸钡锶薄膜的微观结构和铁电性能

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摘要

Barium strontium titanate (BST) thin films were prepared by RF magnetron sputtering. The microstructures and ferroelectric properties of Ba_(0.6)Sr_(0.4)TiO_3 thin films were investigated. The composition of BST thin film with tetragonal perovskite structure was near to that of the BST ceramic target. A 90° domain was observed by piezoresponse force microscopy (PFM). It is found that the critical size from a multi-domain to a single-domain is from 28nm to 33nm. The dielectric constant-voltage curves and polarization hysteresis loops of BST thin films have been measured. At 1kHz the dielectric constant, tunability and dielectric loss of the Ba_(0.6)Sr_(0.4)TiO_3 film with thickness 280nm are 562, 25.6% and 0.016, respectively. The remanent polarization (Pr) and the coercive electric field (Ec) of the BST film are 1.2μC/cm~2 and 42.9kV/cm at room temperature, respectively. The ε_r-V and P-V curves are asymmetric, and show a voltage shift toward the negative side, which may be caused by asymmetric potential barriers at the upper and bottom interfaces.
机译：钛酸锶钡（BST）薄膜是通过射频磁控溅射制备的。研究了Ba_（0.6）Sr_（0.4）TiO_3薄膜的微观结构和铁电性能。具有四方钙钛矿结构的BST薄膜的组成接近于BST陶瓷靶的组成。通过压电响应力显微镜（PFM）观察到90°的区域。发现从多域到单域的临界尺寸为28nm至33nm。测量了BST薄膜的介电常数-电压曲线和极化磁滞回线。在1kHz下，厚度为280nm的Ba_（0.6）Sr_（0.4）TiO_3薄膜的介电常数，可调谐性和介电损耗分别为562、25.6％和0.016。室温下，BST薄膜的剩余极化强度（Pr）和矫顽电场（Ec）分别为1.2μC/ cm〜2和42.9kV / cm。 ε_r-V和P-V曲线是不对称的，并且显示出向负侧的电压偏移，这可能是由于上，下界面的不对称势垒引起的。

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