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首页> 外文会议>TMS(The Minerals, Metals amp; Materials Society) Annual Meeting and Symposium on Surfaces and Interfaces in Nanostructured Materials and Trends in LIGA, Miniaturization, and Nanoscale Materials; 20040314-20040318; Charlotte,NC; US >AUTO-ORGANIZED NANOSTRUCTURES IN THE Ti-Al-N THIN FILM SYSTEM
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AUTO-ORGANIZED NANOSTRUCTURES IN THE Ti-Al-N THIN FILM SYSTEM

机译：Ti-Al-N薄膜系统中的自组织纳米结构

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Age hardening by spinodal decomposition in ceramic thin film systems is reviewed. This is a new concept for advanced surface engineering with applications for wear-resistant coatings in machining processes like high-speed and dry cutting. The reactive arc deposition method with relatively low substrate temperatures is employed to produce supersaturated solid solutions of the material by ion-bombardment-induced mixing of atoms and kinetic limitation to reduce thermodynamically-driven segregation during synthesis. It is shown using electron microscopy, X-ray diffraction, and nanoindentation techniques that Ti_(1-x)Al_xN (0 ≤ x ≤ 1) coatings with compositions in the miscibility gap undergo spinodal decomposition during annealing at temperatures between ～900 ℃ and 1100 ℃. As a result, coherent cubic-phase nanometer-size domains form that cause an increase in hardness. These intermediate metastable domains transform into their stable phases TiN and hexagonal wurtzite-structure A1N during further thermal treatment. The findings are corroborated by Ab initio calculations of phase stability and molar volume for competing phases. Activation energies for the processes indicate defect-assisted segregation of Ti and Al. It is inferred that the success of Ti_(1-x)Al_xN coatings is not only based on its superior oxidation resistance, but also on its ability for self-adaptation to the thermal load applied during cutting by age hardening. The findings and experimental approach have implications also for other ternary and multinary ceramic systems including the group-Ill nitride alloys.
机译：回顾了在陶瓷薄膜系统中由旋节线分解引起的时效硬化。这是用于高级表面工程的新概念，适用于在高速和干切削等加工过程中使用耐磨涂层。采用具有较低基板温度的反应电弧沉积方法，通过离子轰击诱导的原子混合和动力学限制来降低材料的过饱和固溶体，以减少合成过程中热力学驱动的偏析。用电子显微镜，X射线衍射和纳米压痕技术表明，在〜900℃至1100的温度范围内，具有可混溶间隙组成的Ti_（1-x）Al_xN（0≤x≤1）涂层在经历退火过程中发生旋节线分解。 ℃。结果，形成相干的立方相纳米尺寸的畴，导致硬度增加。在进一步热处理期间，这些中间的亚稳态畴转变成其稳定相TiN和六方纤锌矿结构AlN。从头开始计算竞争相的相稳定性和摩尔体积可以证实这一发现。该过程的活化能表明缺陷辅助的Ti和Al偏析。可以推断，Ti_（1-x）Al_xN涂层的成功不仅取决于其优异的抗氧化性，而且还取决于其对时效硬化切削过程中施加的热负荷的自我适应能力。这一发现和实验方法也对包括III族氮化物合金在内的其他三元和多元陶瓷体系产生了影响。

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