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Nanostructured thin film, nanostructured transparent electrode, and method for producing nanostructured thin film
Nanostructured thin film, nanostructured transparent electrode, and method for producing nanostructured thin film
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机译：纳米结构薄膜，纳米结构透明电极及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a nano structure thin film having nano size projections formed in a wide area with a high density, preferably used for the electrode of a photoelectric device, such as a solar cell and simplified even in manufacture, and a method for manufacturing the nano structure thin film.SOLUTION: A nano structure thin film 1 comprises: a base conductive layer 3 formed as a base on a substrate 2; and nano size projections 4 contacted with the base conductive layer 3 and formed of the same material as the base conductive layer 3. The nano size projections 4 comprises a nano structure thin film 1 formed with a density of 1×10to 3×10per 1 mmin an area of 1 mmor more. The shape of the nano size projection 4 includes: a conical shape, quadrangular prism shape and/or quadrangular pyramidal shape having a height H of 10 nm-150 m, a bottom surface diameter W of 1-500 nm and a ratio H/W of 1-1000; and a ball shape having a diameter of 1-500 nm at the tip of the nano size projection 4.
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