Ultra-Small ZnO Nanoparticles for Charge Storage in MOS-Memory Devices

机译：超小ZnO纳米颗粒，用于MOS存储设备中的电荷存储

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ZnO-nanoparticles have gained considerable interest by industry and research due to their excellent properties. However, the agglomeration of nanoparticles is considered to be a limiting factor since it can affect the desirable physical and electronic properties of the nanoparticles. In this work, 1-to-5-nm-thick ZnO-nanoparticles deposited by dip-coating are studied. The results show that dip-coating leads to 1-D quantum confinement in ZnO (2-D nanostructures). Memory devices with ZnO-nanoparticles charge trapping layer show that a large memory window can be obtained at low operating-voltages due to the large available charge trap states in ZnO. Moreover, the excellent retention and endurance characteristics show that ZnO nanoparticles are promising for low-power memory applications.

机译：ZnO纳米粒子因其优异的性能而受到行业和研究的关注。然而，纳米颗粒的团聚被认为是限制因素，因为它会影响纳米颗粒的理想的物理和电子性能。在这项工作中，研究了通过浸涂沉积的1-5nm厚的ZnO纳米颗粒。结果表明，浸涂导致ZnO（2-D纳米结构）中的1-D量子受限。具有ZnO纳米粒子电荷俘获层的存储器件显示，由于ZnO中存在大量可用的电荷俘获状态，因此在低工作电压下可以获得较大的存储器窗口。此外，出色的保留和耐久特性表明ZnO纳米粒子有望用于低功耗存储应用。

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《Wide bandgap semiconductor materials and devices 17》|2016年|73-79|共7页
会议地点 San Diego(US)
作者
N. El-Atab; A. Nayfeh;
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Institute Center for Microsystems - iMicro, EECS, Masdar Institute of Science and Technology Abu Dhabi, United Arab Emirates;

Institute Center for Microsystems - iMicro, EECS, Masdar Institute of Science and Technology Abu Dhabi, United Arab Emirates;

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3. Charge storage characteristics of ultra-small Pt nanoparticle embedded GaAs based non-volatile memory [J] . R. C. Jeff Jr, M. Yun, B. Ramalingam, Applied Physics Letters . 2011,第7期

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4. Ultra-Small ZnO Nanoparticles for Charge Storage in MOS-Memory Devices [C] . N. El-Atab, A. Nayfeh Symposium on wide bandgap semiconductor materials and devices 17 . 2016

机译：用于MOS存储装置中的电荷存储的超小ZnO纳米粒子
5. Atomic Layer Deposition of Platinum Nano-particles and High-k Dielectrics for Non-volatile Charge Storage Memory Devices. [D] . Novak, Steven Randall. 2010

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Ultra-Small ZnO Nanoparticles for Charge Storage in MOS-Memory Devices

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