CONTACT EVOLUTION IN A MICROMECHANICAL SWITCH

机译：微动开关中的接触演化

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An AFM-based test station has been established for rapid mechanical and electrical characterization of contacts in a micromechanical switch. A wide contact force range is accessible, from nN to mN, determined by the mechanical properties of the microfabricated contact test cantilevers. During testing the contact force, deformation, and contact adhesion are measured. Periodic observations of material transfer are made. The cycling rate can reach 200 kHz.

机译：已经建立了一个基于AFM的测试站，用于对微机械开关中的触点进行快速的机械和电气表征。接触力的范围很广，从nN到mN，由微细接触试验悬臂的机械性能决定。在测试过程中，将测量接触力，变形和接触粘附力。定期观察材料转移。循环速率可以达到200 kHz。

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来源
《World Tribology Congress III 2005 vol.2》|2005年|P.817-818|共2页
会议地点 WashingtonDC(US)
作者
Lei Chen; Nicol E. McGruer; George G. Adams;
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作者单位

MicroFabrication Laboratory Northeastern University, Boston, MA 02115;

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原文格式 PDF
正文语种 eng
中图分类机械摩擦、磨损与润滑;
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CONTACT EVOLUTION IN A MICROMECHANICAL SWITCH

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