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首页> 外文会议>XV international conference on electron microscopy >Effect of the electron energy on the structural evolution of functional perovskite La_(0.6)Ca_(0.4)CoO_3 thin films produced by the pulsed electron deposition (PED) technique
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Effect of the electron energy on the structural evolution of functional perovskite La_(0.6)Ca_(0.4)CoO_3 thin films produced by the pulsed electron deposition (PED) technique

机译：电子能量对通过脉冲电子沉积（PED）技术生产的功能钙钛矿La_（0.6）Ca_（0.4）CoO_3薄膜的结构演变的影响

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摘要

Functional nonstoichiometric La_(0.6)Ca_(0.4)CoO_3 perovskite thin films were deposited on the epi-polished [001] MgO substrates by the electron ablation process (PED - pulsed electron deposition) in low oxygene pressure conditions (~7 x 10~(-3) Torr). Deposition process was performed for about 4 hours with the repetition rate of 5 Hz that gave about 72 000 pulses for each sample. By adjusting both the target-substrate distance in the working chamber (70 - 80 mm) as well as the electron energy (10 - 14 kV) it is possible to affect the microstructure and quality of obtained thin films. This paper relates to the influence of the single pulse electron energy (discharge) on the structure of LaCaCoO_3 thin films investigated by means of scanning electron microscopy, transmission electron microscopy and atomic force microscopy. The chemical compositions were also examined using energy dispersive spectroscopy. Multiple linear scratch tests allowed to determine the thin films adhesion to the substrates.
机译：功能性非化学计量的La_（0.6）Ca_（0.4）CoO_3钙钛矿薄膜通过电子烧蚀工艺（PED-脉冲电子沉积）在低氧气压力条件下（〜7 x 10〜（ -3）Torr）。沉积过程进行了约4小时，重复频率为5 Hz，每个样品产生约72 000个脉冲。通过调整工作室中目标基板的距离（70-80毫米）以及电子能量（10-14 kV），可以影响所获得薄膜的微观结构和质量。通过扫描电子显微镜，透射电子显微镜和原子力显微镜研究了单脉冲电子能量（放电）对LaCaCoO_3薄膜结构的影响。还使用能量色散光谱检查了化学组成。多次线性刮擦测试可以确定薄膜对基材的粘附性。

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