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Design, fabrication, and characterization of a MEMS dual-backplate capacitive microphone.

机译：MEMS双背板电容式麦克风的设计，制造和表征。

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摘要

A microphone is an instrument that measures an acoustic signal and generates an electrical output. Microphones have many common applications ranging from use in cellular phones and computers to high quality studio microphones for music recording. However, there is a less familiar application for microphones: microphones are utilized by commercial aircraft manufacturers to assist in the development of quiet aircraft. Communities surrounding airports object to the loud noises produced by approaching and departing aircraft. Therefore, strict regulations exist to limit the noise radiated by commercial aircraft. To reduce the noise radiation of airframes and jet engines, aircraft manufacturers perform rigorous testing during the development and qualification of their products. The microphones used for these measurements have specifications that differ greatly from a common audio microphone.;The industry relies on expensive non-MEMS microphones for aeroacoustic measurements. To date, there have been many MEMS microphones developed; some are even successful commercial products. However, the majority are targeted for audio applications. The existing aeroacoustic MEMS microphones show promise; however, the performance must be improved to compete with existing non-MEMS microphones. The goal of this research is to design a MEMS-based microphone suitable for aeroacoustic measurements, while improving on the performance of existing devices.;This study details a thorough review of previous MEMS microphones and identifies which are most suitable for aeroacoustic measurements. Furthermore, the specific opportunities for improvement are discussed. A thorough development of the theory of operation for capacitive microphones is presented. Using this theoretical framework, the design of an aeroacoustic capacitive MEMS microphone is presented. The microphone is fabricated using the SUMMiT V process at Sandia National Laboratories. Multiple microphones are tested and the results indicate the designed microphone compares favorably to previous aeroacoustic MEMS microphones.
机译：麦克风是一种测量声音信号并产生电输出的乐器。麦克风具有许多常见的应用，范围从蜂窝电话和计算机中使用到用于录音的高质量录音室麦克风。但是，对于麦克风的应用却不太熟悉：麦克风被商用飞机制造商用来协助开发安静的飞机。机场周围的社区反对飞机进出时所产生的巨大噪音。因此，存在严格的法规来限制商用飞机辐射的噪声。为了减少机身和喷气发动机的噪声辐射，飞机制造商在产品开发和鉴定过程中进行了严格的测试。用于这些测量的麦克风的规格与普通的音频麦克风有很大的不同。;业界依靠昂贵的非MEMS麦克风进行航空声学测量。迄今为止，已经开发了许多MEMS麦克风。有些甚至是成功的商业产品。但是，大多数针对音频应用。现有的航空声学MEMS麦克风显示出了希望。但是，必须提高性能才能与现有的非MEMS麦克风竞争。这项研究的目的是设计一种适用于航空声学测量的，基于MEMS的麦克风，同时改善现有设备的性能。这项研究详细介绍了以前的MEMS麦克风，并确定了最适用于航空声学测量的麦克风。此外，还讨论了具体的改进机会。提出了电容式麦克风工作原理的全面发展。使用该理论框架，提出了一种航空声电容式MEMS麦克风的设计。麦克风是在Sandia国家实验室使用SUMMiT V工艺制造的。测试了多个麦克风，结果表明所设计的麦克风与以前的航空MEMS麦克风相比具有优势。

著录项

  • 作者

    Martin, David Thomas.;

  • 作者单位

    University of Florida.;

  • 授予单位 University of Florida.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2007
  • 页码 250 p.
  • 总页数 250
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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