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Acoustic wave sensing system based on aluminum nitride dual-mode sensors and digital phase detection approach.

机译：基于氮化铝双模传感器和数字相位检测方法的声波传感系统。

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摘要

Recently, SAW sensors with high sensitivity, low cost and compact size attracted interests in various sensing fields, especially in the biosensing fields. This work focuses on the developments of AlN thin film based SAW sensor system, related digital phase detection system and the AlN SH-SAW sensor applications.;A complete process procedure has been developed to fabricate delay line devices using plasma source molecular beam epitaxy system and photolithography techniques. Critical parameters, such as insertion losses and operating frequencies of devices, have been measured to assist to reduce the influences of the second order effects, like electromagnetic feedthrough, edge reflections and triple transient interference. Sensor and circuit optimizations have led to high signal noise ratio for differential sensors.;A digital phase detection system based on the zero-crossing algorithm has been developed. Phase detection limits with and without AlN differential sensors have been measured. Our baseline experiments without a sensor indicate that the system has a level of phase noise with the standard deviation being about 0.005°. Experiments with the AlN differential sensors running in the SAW and SH-SAW modes illustrate that the system can reach a phase detection limit of 0.02° at operating frequencies of more than 200 MHz. Differential configuration exhibits excellent performance regarding impact of temperature variation on the two sensors.;Several kinds of coating methods and flow cells for liquid sensing experiments have been developed and compared. Conductivity and viscosity sensing experiments have been taken and the results exhibit the attractive features of the AlN SH-SAW mode in liquid applications. Biosensing procedures for detecting E. coli K99 have been undertaken and the results show responses and sensitivity of AlN sensors to the binding between bacteria and specific antibodies.
机译：近来，具有高灵敏度，低成本和紧凑尺寸的SAW传感器引起了各个传感领域的兴趣，特别是在生物传感领域。这项工作的重点是基于AlN薄膜的SAW传感器系统，相关的数字相位检测系统以及AlN SH-SAW传感器应用的开发。;已经开发了完整的工艺流程来制造使用等离子源分子束外延系统的延迟线器件。光刻技术。已测量了关键参数，例如设备的插入损耗和工作频率，以帮助减少诸如电磁馈通，边缘反射和三重瞬态干扰之类的二阶效应的影响。传感器和电路的优化导致差分传感器的信号噪声比很高。；开发了一种基于过零算法的数字相位检测系统。已测量有无AlN差分传感器的相位检测极限。我们在没有传感器的情况下进行的基准实验表明，该系统具有一定的相位噪声水平，标准偏差约为0.005°。在SAW和SH-SAW模式下运行的AlN差分传感器的实验表明，该系统在200 MHz以上的工作频率下可以达到0.02°的相位检测极限。差动配置在温度变化对两个传感器的影响方面表现出优异的性能。已经进行了电导率和粘度传感实验，结果显示了在液体应用中AlN SH-SAW模式的吸引人的特征。已经进行了用于检测大肠杆菌K99的生物传感程序，结果显示了AlN传感器对细菌和特异性抗体之间结合的响应和敏感性。

著录项

  • 作者

    Hu, Guopeng.;

  • 作者单位

    Wayne State University.;

  • 授予单位 Wayne State University.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2008
  • 页码 166 p.
  • 总页数 166
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;
  • 关键词

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