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Digital phase detection approach and its application for A1N dual-mode differential surface acoustic wave sensing

机译：数字相位检测方法及其在A1N双模差分声表面波传感中的应用

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摘要

Performance of a conventional phase detector implemented using analog circuitry is affected by, among other factors, the parameter value drifting of the analog components with environment (e.g., temperature) and time (i.e., aging). It is also adversely impacted by electromagnetic interferences likely existing in the analog circuits when the detector operates in a high frequency range. More importantly, such a detector is inflexible to compensate various nonlinear characteristics of sensors and is very difficult to realize sophisticated signal processing strategies desired for practical applications. To address issues like these, we have developed a digital system approach that uses the zero-crossing algorithm for phase detection. The phase detection limit and dynamic phase response of the system were assessed using surface acoustic wave (SAW) sensors. Our preliminary evaluation involved aluminum nitride (A1N) dual-mode differential sensors, which were fabricated on an A1N(0001)/Al_2O_3(1120) thin film structure, with the SAW and shear horizontal SAW (SH-SAW) operating at approximately 243 MHz and 256 MHz, respectively. Due to the hardware constraints, the digital phase processing was carried out in an off-line fashion. Our baseline experiments without sensor indicate that the system can achieve a lower level of phase noise with the standard deviation being about 0.005°. Experiments with the differential sensors running in the SAW and SH-SAW modes exhibit that the system can reach a phase detection limit of 0.02°. The differential system showed small temperature coefficient at ppm level measured by varying the sensor temperature using a thermal control oven. Finally, our use of the system in measuring the response of the SH-SAW sensor to sodium chloride (NaCl) solution conductivity shows that the system is capable of performing microanalysis of liquid properties. We conclude that a real-time fully digital phase detection system can be practically achieved.
机译：使用模拟电路实现的常规鉴相器的性能除其他因素外，还受到模拟分量的参数值随环境（例如温度）和时间（即老化）的漂移的影响。当检测器在高频范围内工作时，它也会受到模拟电路中可能存在的电磁干扰的不利影响。更重要的是，这种检测器不能灵活地补偿传感器的各种非线性特性，并且很难实现实际应用所需的复杂信号处理策略。为了解决此类问题，我们开发了一种数字系统方法，该方法使用零交叉算法进行相位检测。使用表面声波（SAW）传感器评估了系统的相位检测极限和动态相位响应。我们的初步评估涉及氮化铝（A1N）双模差分传感器，该传感器是在A1N（0001）/ Al_2O_3（1120）薄膜结构上制造的，并且SAW和水平剪切SAW（SH-SAW）的工作频率约为243 MHz和256 MHz。由于硬件的限制，数字相位处理是以离线方式进行的。我们没有传感器的基准实验表明，该系统可以实现较低的相位噪声水平，标准偏差约为0.005°。在SAW和SH-SAW模式下运行的差分传感器的实验表明，该系统可以达到0.02°的相位检测极限。差分系统显示出较小的温度系数（ppm级），这是通过使用热控制箱改变传感器温度来测量的。最后，我们在测量SH-SAW传感器对氯化钠（NaCl）溶液电导率的响应中使用该系统表明，该系统能够执行液体特性的微分析。我们得出结论，实际上可以实现实时全数字相位检测系统。

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