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首页> 外文学位 >Design, fabrication, and characterization of a rotary variable-capacitance micromotor supported on microball bearings.
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Design, fabrication, and characterization of a rotary variable-capacitance micromotor supported on microball bearings.

机译：设计，制造和表征微球轴承支撑的旋转可变电容微电机。

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摘要

The design, fabrication, and characterization of a rotary micromotor supported on microball bearings are reported in this dissertation. This is the first demonstration of a rotary micromachine with a robust mechanical support provided by microball-bearing technology. One key challenge in the realization of a reliable micromachine, which is successfully addressed in this work, is the development of a bearing that would result in high stability, low friction, and high resistance to wear. A six-phase, rotary, bottom-drive, variable-capacitance micromotor is designed and simulated using the finite element method. The geometry of the micromotor is optimized based on the simulation results. The development of the rotary machine is based on studies of fabrication and testing of linear micromotors. The stator and rotor are fabricated separately on silicon substrates and assembled with the stainless steel microballs. Three layers of low-k benzocyclobutene (BCB) polymer, two layers of gold, and a silicon microball housing are fabricated on the stator. The BCB dielectric film, compared to conventional silicon dioxide insulating films, reduces the parasitic capacitance between electrodes and the stator substrate. The microball housing and salient structures (poles) are etched in the rotor and are coated with a silicon carbide film to reduce friction. A characterization methodology is developed to measure and extract the angular displacement, velocity, acceleration, torque, mechanical power, coefficient of friction, and frictional force through non-contact techniques. A top angular velocity of 517 rpm corresponding to the linear tip velocity of 324 mm/s is measured. This is 44 times higher than the velocity achieved for linear micromotors supported on microball bearings. Measurement of the transient response of the rotor indicated that the torque is 5.62±0.5 micro N-m which is comparable to finite element simulation results predicting 6.75 micro N-m. Such a robust rotary micromotor can be used in developing micropumps which are highly demanded microsystems for fuel delivery, drug delivery, cooling, and vacuum applications. Micromotors can also be employed in micro scale surgery, assembly, propulsion, and actuation.
机译：本文报道了微球轴承支撑的旋转微电机的设计，制造和特性。这是旋转微机的首次演示，该微机具有由微球轴承技术提供的强大的机械支撑。在这项工作中成功解决的，实现可靠的微型机械的一个关键挑战是轴承的开发，该轴承将导致高稳定性，低摩擦和高耐磨性。使用有限元方法设计并仿真了六相，旋转，底部驱动，可变电容的微电机。基于仿真结果优化了微电机的几何形状。旋转电机的发展基于对线性微电机的制造和测试的研究。定子和转子分别在硅基板上制造，并与不锈钢微球组装在一起。在定子上制造了三层低k苯并环丁烯（BCB）聚合物，两层金和一个硅微球外壳。与传统的二氧化硅绝缘膜相比，BCB介电膜减少了电极和定子基板之间的寄生电容。微球外壳和突出结构（磁极）在转子中蚀刻，并涂有碳化硅膜以减少摩擦。开发了一种表征方法，以通过非接触技术测量和提取角位移，速度，加速度，扭矩，机械功率，摩擦系数和摩擦力。测量的最高角速度为517 rpm，对应于324 mm / s的线性尖端速度。这是微型滚珠轴承上支撑的线性微型电动机的速度的44倍。转子瞬态响应的测量表明，扭矩为5.62±0.5 micro N-m，与预测6.75 micro N-m的有限元模拟结果相当。这种坚固耐用的旋转微电机可用于开发微型泵，这些微型泵是燃料输送，药物输送，冷却和真空应用中非常需要的微型系统。微型马达还可用于微型手术，组装，推进和致动。

著录项

  • 作者

    Ghalichechian, Nima.;

  • 作者单位

    University of Maryland, College Park.;

  • 授予单位 University of Maryland, College Park.;
  • 学科 Engineering Electronics and Electrical.;Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2007
  • 页码 211 p.
  • 总页数 211
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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