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Design and micro-fabrication of high-speed micro-switches.

机译：高速微动开关的设计和微制造。

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摘要

Electromechanical vibration suppression systems reveal the necessity for a high-speed micro-switch. High-speed micro-switches are also required for devices such as wave-phase shifters for phased-array antennas, wireless telecommunications, and other Radio-Frequency (RF) signal devices. These devices not only require a high switching speed, but also low energy consumption and high power handling. Standard Integrated Circuit (IC) switches or solid state relays (SSR's) can meet the switching time requirement. However, these switches are not able to handle the voltage required on vibration suppression systems. The present work analysed different micro-switch configurations and focused attention on comb drivers or lateral actuators. Advantages such as a single mask fabrication procedure and its ability to tune the on and off time of the micro-switch were fully analysed, resulting in a high-speed micro-switch actuated by a low voltage 30V. A detailed micro-manufacturing procedure involving a novel nickel electrodeposition on silicon without a seed layer was employed to fabricate these micro-switches. In addition, an acetone drying procedure was implemented to avoid stiction successfully realising structure with a 3:1 height aspect ratio. A computational model was developed to design micro-switches with a switching on time below 20 microseconds. Experiments with fabricated devices showed excellent agreement between model predictions and micro-switch motion.
机译：机电减振系统表明了高速微动开关的必要性。诸如相控阵天线的波移相器，无线电信和其他射频（RF）信号设备之类的设备也需要高速微动开关。这些设备不仅需要高开关速度，而且还要求低能耗和高功率处理能力。标准集成电路（IC）开关或固态继电器（SSR）可以满足开关时间要求。但是，这些开关不能处理振动抑制系统所需的电压。本工作分析了不同的微动开关配置，并将注意力集中在梳状驱动器或横向致动器上。充分分析了诸如单个掩模制造程序及其调整微动开关导通和关断时间的能力等优点，从而产生了由30V低压驱动的高速微动开关。详细的微制造过程涉及在硅上进行无籽晶层的新型镍电沉积，以制造这些微开关。此外，还实施了丙酮干燥程序，以避免静摩擦成功地实现了高宽比为3：1的结构。开发了一种计算模型，以设计接通时间低于20微秒的微动开关。使用装配好的设备进行的实验表明，模型预测与微动开关运动之间具有极好的一致性。

著录项

  • 作者

    Corti, Luigi Giancarlo.;

  • 作者单位

    University of Idaho.;

  • 授予单位 University of Idaho.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2006
  • 页码 55 p.
  • 总页数 55
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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