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首页> 外文学位 >MEMS cantilever sensor for THz photoacoustic chemical sensing and pectroscopy.
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MEMS cantilever sensor for THz photoacoustic chemical sensing and pectroscopy.

机译：MEMS悬臂传感器，用于太赫兹光声化学感测和光谱学。

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摘要

Sensitive Microelectromechanical System (MEMS) cantilever designs were modeled, fabricated, and tested to measure the photoacoustic (PA) response of gasses to terahertz (THz) radiation. Surface and bulk micromachining technologies were employed to create the extremely sensitive devices that could detect very small changes in pressure. Fabricated devices were then tested in a custom made THz PA vacuum test chamber where the cantilever deflections caused by the photoacoustic effect were measured with a laser interferometer and iris beam clipped methods. The sensitive cantilever designs achieved a normalized noise equivalent absorption coefficient of 2.83x10-10 cm-1 W Hz-½ using a 25 microW radiation source power and a 1 s sampling time. Traditional gas phase molecular spectroscopy absorption cells are large and bulky. The outcome of this research resulted was a photoacoustic detection method that was virtually independent of the absorption path-length, which allowed the chamber dimensions to be greatly reduced, leading to the possibility of a compact, portable chemical detection and spectroscopy system.
机译：对灵敏的微机电系统（MEMS）悬臂设计进行建模，制造和测试，以测量气体对太赫兹（THz）辐射的光声（PA）响应。使用表面和整体微机械加工技术来创建极其敏感的设备，可以检测到很小的压力变化。然后，在定制的THz PA真空测试室中对制造的设备进行测试，在其中通过激光干涉仪和虹膜束夹方法测量由光声效应引起的悬臂挠度。灵敏的悬臂设计使用25微瓦的辐射源功率和1 s的采样时间实现了2.83x10-10 cm-1 W Hz-1 / 2的归一化噪声等效吸收系数。传统的气相分子光谱吸收池大而笨重。这项研究的结果是一种光声检测方法，该方法实际上与吸收路径的长度无关，这使得腔室尺寸大大减小，从而导致了紧凑，便携式化学检测和光谱系统的可能性。

著录项

  • 作者

    Glauvitz, Nathan E.;

  • 作者单位

    Air Force Institute of Technology.;

  • 授予单位 Air Force Institute of Technology.;
  • 学科 Engineering Electronics and Electrical.;Physics Molecular.
  • 学位 Ph.D.
  • 年度 2013
  • 页码 217 p.
  • 总页数 217
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-17 11:40:54

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