• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文学位 >Creating and imaging surface acoustic waves on gallium arsenide.
【24h】

Creating and imaging surface acoustic waves on gallium arsenide.

机译：在砷化镓上创建和成像表面声波。

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The versatility of surface acoustic wave (SAW) devices stems from the accessibility of the propagation path to modification and detection. This has led to the integration of SAWs in a variety of novel fields, including quantum information processing.;An indispensable tool for the characterization of one-port transducers is an all optical probe to measure the displacement field of a SAW. This work details the design and construction of a scanning Sagnac interferometer that is capable of measuring the outward displacement of a surface. The spatial resolution of the interferometer was 2:4+/-0:2 mum and the displacement sensitivity was determined to be 4+/-1 pm. The instrument was used to map the SAW displacement field from a 358MHz transducer, with results showing the resonant cavity behaviour of the fingers due to Bragg reflections. It also allowed for the direct detection of the SAW amplitude as a function of the driving frequency of the transducer. The results showed good agreement with the related S21 scattering parameter. Lastly, the interferometer was used to image the attenuated propagation of SAWs through a phononic crystal. Results showed good agreement with theoretical simulations.;The development of technologically competitive devices requires the use of gigahertz frequency SAWs. This thesis develops fabrication processes for high frequency interdigital transducers on gallium arsenide. Optically lithography was used to create linear and stepped transducers, with a minimum feature size of 2 mum, that were driven at their fifth harmonic. The highest frequency achieved was 1435 MHz, but the power absorbed was less than 3% and insertion losses were greater than --80 dB. Further improvements in the design and fabrication are required if optically fabricated transducers are to be an alternative to transducers with narrower finger widths. Electron-beam lithography techniques were developed and used to create transducers with finger widths of 500 and 400 nm, with fundamental resonance frequencies of 1387 and 1744 MHz, respectively. The power absorbed was 3 to 6% with insertion losses greater than --45 dB. The performance characteristics can be improved by the removal of residual resist on the surface of the transducer.
机译：声表面波（SAW）设备的多功能性源于传播路径易于修改和检测。这导致SAW集成在包括量子信息处理在内的许多新领域中。用于表征单端口换能器的必不可少的工具是用于测量SAW位移场的全光学探针。这项工作详细介绍了能够测量表面向外位移的扫描Sagnac干涉仪的设计和构造。干涉仪的空间分辨率为2：4 +/- 0：2毫米，位移灵敏度确定为4 +/- 1 pm。该仪器用于绘制358MHz换能器的声表面波位移场，结果显示了由于布拉格反射引起的手指谐振腔行为。还可以根据传感器的驱动频率直接检测SAW幅度。结果与相关的S21散射参数吻合良好。最后，使用干涉仪对声表面波通过声子晶体的衰减传播进行成像。结果表明与理论仿真具有很好的一致性。；具有技术竞争力的设备的开发需要使用千兆赫频率声表面波。本文研究了砷化镓上高频叉指换能器的制造工艺。光刻用于创建线性和阶梯式换能器，其最小特征尺寸为2微米，并在其五次谐波下驱动。达到的最高频率为1435 MHz，但吸收的功率小于3％，插入损耗大于--80 dB。如果光学制造的传感器要替代手指宽度较窄的传感器，则需要在设计和制造上进行进一步的改进。电子束光刻技术得到了发展，并用于创建指宽分别为500和400 nm，基本谐振频率分别为1387和1744 MHz的换能器。吸收的功率为3％至6％，插入损耗大于--45 dB。通过去除换能器表面上的残留抗蚀剂可以改善性能特征。

著录项

  • 作者

    Mathew, Reuble.;

  • 作者单位

    Queen's University (Canada).;

  • 授予单位 Queen's University (Canada).;
  • 学科 Physics Condensed Matter.
  • 学位 M.A.Sc.
  • 年度 2010
  • 页码 118 p.
  • 总页数 118
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号