• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文学位 >Mechanical and optical properties of plasma deposited superhard nanocomposite coatings.
【24h】

Mechanical and optical properties of plasma deposited superhard nanocomposite coatings.

机译：等离子体沉积的超硬纳米复合涂层的机械和光学性能。

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this work, we investigate the growth and the characteristics of nc-TiN/SiN 1.3 and nc-TiCxNy/SiCN superhard coatings. These materials were fabricated by plasma enhanced chemical vapor deposition (PECVD) in a radio frequency discharge using intense ion bombardment. The coatings were deposited from TICl4/SiH4/CH4/N 2 gas mixtures at a pressure of 200 mTorr (26.66 Pa) and with substrate temperatures ranging from 300 to 500°C. We systematically evaluate the films' mechanical and optical properties, and we interpret them in terms of their microstructure.; The first part of the work describes the nc-TiN/SiN1.3 system. The mechanical properties and microstructure of coatings deposited at a low temperature of 300°C are systematically compared with those deposited at 500°C.; After establishing the methodology of mechanical measurements, we optimized the nc-TiN/SiN1.3 from the point of view of hardness and Young's modulus. By changing the amount of SiN1.3 we identified optimum deposition conditions resulting in the highest hardness and reduced Young's modulus, up to 45 and 350 GPa, respectively.; In the second part of this work, we studied the properties of SiCN films, which were then used as a matrix in the nanocomposite. By adding an optimized amount of carbon to SiN1.3 (∼28 at.%), a hardness of 33 GPa, a reduced Young's modulus of 200 GPa and an elastic rebound of 85% were obtained. Such high hardness compared to 18 GPa for SiN1.3 and 26 GPa for SiC, is attributed to the formation of C-N bonds. The new SiCN material was incorporated in the novel, quaternary nc-TiCxNy/SiCN system.; The final part of this work describes quaternary nc-TiCxN y/SiCN coatings. At an optimum C concentration (∼10 at.%), the nc structure is preserved and it is characterized by very high hardness (55 GPa), high reduced Young's modulus (306 GPa), and an elastic rebound of more than 80%. High resistance to plastic deformation, expressed by a high H3/Er2 ratio of up to 1.8 GPa was obtained; this is higher than reported by any other group. The mechanical stress was between 2.0 and 2.5 GPa in compression. The friction coefficient and the wear rate, measured against diamond, were found to be 0.13 and 12*10-6 mm3/Nm, respectively. Such superior mechanical performance is attributed to a combined effect of nc structure together with enhanced properties of the SiCN matrix and strong Ti-C bonds in the nanocrystals. (Abstract shortened by UMI.)
机译：在这项工作中，我们研究了nc-TiN / SiN 1.3和nc-TiCxNy / SiCN超硬涂层的生长及其特性。这些材料是通过使用强离子轰击在射频放电中通过等离子体增强化学气相沉积（PECVD）制成的。涂层是从TICl4 / SiH4 / CH4 / N 2气体混合物中以200 mTorr（26.66 Pa）的压力和300至500°C的基材温度沉积的。我们系统地评估了薄膜的机械和光学性能，并根据其微观结构对其进行了解释。工作的第一部分描述了nc-TiN / SiN1.3系统。系统地比较了在500°C的低温下沉积的涂层的机械性能和微观结构。建立机械测量方法后，我们从硬度和杨氏模量的角度优化了nc-TiN / SiN1.3。通过改变SiN1.3的量，我们确定了最佳的沉积条件，从而导致了最高的硬度和降低的杨氏模量，分别达到45和350 GPa。在这项工作的第二部分，我们研究了SiCN薄膜的性能，然后将其用作纳米复合材料的基质。通过向SiN1.3（约28 at。％）中添加最适量的碳，可获得33 GPa的硬度，200 GPa的降低的杨氏模量和85％的弹性回弹。与SiN1.3的18 GPa和SiC的26 GPa相比，如此高的硬度归因于C-N键的形成。新的SiCN材料被并入新颖的四元nc-TiCxNy / SiCN系统。这项工作的最后一部分描述了四元nc-TiCxN y / SiCN涂层。在最佳的C浓度（约10 at。％）下，nc结构得以保留，并且具有很高的硬度（55 GPa），高的杨氏模量（306 GPa）和超过80％的弹性回弹。获得了高达1.8 GPa的高H3 / Er2比表示的高抗塑性变形能力；这高于其他任何组织的报告。压缩时的机械应力在2.0至2.5 GPa之间。对金刚石测得的摩擦系数和磨损率分别为0.13和12 * 10-6 mm3 / Nm。如此优异的机械性能归因于nc结构的共同作用，以及SiCN基体增强的性能和纳米晶体中牢固的Ti-C键。 （摘要由UMI缩短。）

著录项

  • 作者

    Jedrzejowski, Pawel Michal.;

  • 作者单位

    Ecole Polytechnique, Montreal (Canada).;

  • 授予单位 Ecole Polytechnique, Montreal (Canada).;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2004
  • 页码 181 p.
  • 总页数 181
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号