• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文学位 >Electrostatic radio frequency (RF) microelectromechanical systems (MEMS) switches with metal alloy electric contacts.
【24h】

Electrostatic radio frequency (RF) microelectromechanical systems (MEMS) switches with metal alloy electric contacts.

机译：带有金属合金电触点的静电射频（RF）微机电系统（MEMS）开关。

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Radio frequency (RF) microelectromechanical systems (MEMS) switches are paramount in importance for improving current and enabling future USAF RF systems. Electrostatic micro-switches are ideal for RF applications because of their superior performance and low power consumption. The primary failure mechanisms for micro-switches with gold contacts are becoming stuck closed and increased contact resistance with increasing switch cycles. This dissertation reports on the design, fabrication, and testing of micro-switches with sputtered bimetallic (i.e., gold (Au)-on-Au-(6.3at%)platinum (Pt)), binary alloy (i.e., Au-(3.7at%)palladium (Pd) and Au-(6.3at%)Pt), and ternary alloy (i.e., Au-(5at%)Pt-(0.5at%)copper (Cu)) contact metals. Performance was evaluated, in-part, using measured contact resistance and lifetime results. The micro-switches with bi-metallic and binary alloy contacts exhibited contact resistance between 1--2 ohms and, when compared to micro-switches with sputtered gold contacts, showed an increase in lifetime. The micro-switches with tertiary alloy contacts showed contact resistance between 0.2--1.8---and also showed increased lifetime. Overall, the results presented in this dissertation indicate that micro-switches with gold alloy electric contacts exhibit increased lifetimes in exchange for a small increase in contact resistance.
机译：射频（RF）微机电系统（MEMS）开关对于改善电流和支持未来的USAF RF系统至关重要。静电微动开关具有卓越的性能和低功耗，因此是RF应用的理想选择。具有金触点的微动开关的主要故障机制正变得闭合，并且随着开关周期的增加，接触电阻也增加。本文报道了具有双金属溅射（即金（Au）-金（6.3at％）铂（Pt）），二元合金（即Au-（3.7）的微动开关的设计，制造和测试。钯（Pd）和金（6.3at％）Pt）和三元合金（金（5at％）Pt-（0.5at％）铜（Cu））接触金属。使用测得的接触电阻和使用寿命结果部分评估了性能。具有双金属和二元合金触点的微动开关的接触电阻在1--2欧姆之间，与具有溅射金触点的微动开关相比，其使用寿命增加。具有三级合金触点的微动开关的接触电阻在0.2--1.8-之间，并且使用寿命也更长。总体而言，本文提出的结果表明，具有金合金电触点的微动开关具有更长的寿命，而接触电阻的增加很小。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号