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首页> 外文学位 >Performance of biocompatible aluminum oxide films deposited by AC magnetron sputtering at low temperatures.
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Performance of biocompatible aluminum oxide films deposited by AC magnetron sputtering at low temperatures.

机译：交流磁控溅射在低温下沉积的生物相容性氧化铝膜的性能。

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摘要

In this work, the performance of aluminum oxide (A1,03) films deposited at low temperatures for biomedical applications was investigated. Due to its excellent physical properties, aluminum oxide is one of the most attractive materials in the biomedical industry.;This work focused on the performance of alumina films with respect to surgical cutting devices and implants. Alumina films were deposited at low temperatures, around 350°C, by AC inverted magnetron sputtering technique. The films were deposited at various oxygen partial pressures and power. In this work, XRD, TEM, and SAD technologies were used to characterize the films. Several tests were carried out to study the performance of alumina-coated substrates.;In this study, mixed phase alumina coatings were deposited on silicon, stainless steel, Ti-6A1-4V, and nickel-coated TEM grids. It was observed that coating substrates with alumina improves the corrosion resistance of the substrate material. Alumina films also showed a reduction in the amount of residual protein adsorbed when compared to uncoated substrates. Adhesion test results suggest that the presence of titanium nitride improves the adhesion of alumina films to the substrates.;Future work will investigate methods to improve the adhesion of aluminum oxide films.
机译：在这项工作中，研究了在低温下用于生物医学应用的氧化铝（A1,03）薄膜的性能。由于其优异的物理性能，氧化铝是生物医学行业中最具吸引力的材料之一。这项工作的重点是氧化铝膜在外科手术切割设备和植入物方面的性能。通过AC倒置磁控溅射技术在约350℃的低温下沉积氧化铝膜。在各种氧气分压和功率下沉积薄膜。在这项工作中，XRD，TEM和SAD技术被用来表征薄膜。进行了一些测试来研究氧化铝涂层基体的性能。在这项研究中，混合相氧化铝涂层沉积在硅，不锈钢，Ti-6A1-4V和镍涂层TEM网格上。观察到用氧化铝涂覆基材改善了基材的耐腐蚀性。与未涂覆的基材相比，氧化铝膜还显示出吸附的残留蛋白质量减少。附着力测试结果表明，氮化钛的存在改善了氧化铝膜与基材的附着力。未来的工作将研究提高氧化铝膜附着力的方法。

著录项

  • 作者

    Ruiz Flores, Ana Carolina.;

  • 作者单位

    University of Arkansas.;

  • 授予单位 University of Arkansas.;
  • 学科 Engineering Biomedical.;Engineering Mechanical.;Engineering Materials Science.
  • 学位 M.S.
  • 年度 2010
  • 页码 48 p.
  • 总页数 48
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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